Invention Grant
- Patent Title: Optical probe, attachable cover, and shape measuring apparatus
- Patent Title (中): 光学探针,可附接盖和形状测量装置
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Application No.: US14612467Application Date: 2015-02-03
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Publication No.: US09255792B2Publication Date: 2016-02-09
- Inventor: Kentaro Nemoto , Masaoki Yamagata , Eisuke Moriuchi , Tadashi Iwamoto
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2014-022768 20140207
- Main IPC: G01B11/24
- IPC: G01B11/24 ; G01B11/30 ; G02B1/11 ; G01B11/02

Abstract:
An optical probe includes a probe cover, within which is installed an optical system having an illuminating optical system and a receiving optical system. An emitting region and an incidence region through which light passes are provided to a bottom surface of the probe cover, the bottom surface forming an opposing region opposite a work piece. The bottom surface forms a surface where, of the light reflected from the work piece, light following a direct reflection direction is reflected in a direction moving away from the incidence region, from a position where light emitted from the emitting region is emitted at the work piece. Accordingly, an amount of second order reflected light striking the incidence region can be suppressed and, therefore, an occurrence of an erroneous value in received light distribution can be suppressed.
Public/Granted literature
- US20150226543A1 OPTICAL PROBE, ATTACHABLE COVER, AND SHAPE MEASURING APPARATUS Public/Granted day:2015-08-13
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