Illumination apparatus, illumination method, measuring apparatus, and measuring method
    1.
    发明授权
    Illumination apparatus, illumination method, measuring apparatus, and measuring method 有权
    照明装置,照明方法,测量装置和测量方法

    公开(公告)号:US09500474B2

    公开(公告)日:2016-11-22

    申请号:US14601280

    申请日:2015-01-21

    CPC classification number: G01B11/24 G01B11/25

    Abstract: An illumination apparatus according to the present invention includes a light source, a reflecting mirror, an optical system, and a calculator. The reflecting mirror includes a first reflector and a second reflector, and is capable, while changing a reflection angle, of reflecting and directing at an object a first divided light, the first divided light being a portion of light from the light source emitted at the first reflector. The optical system divides the light from the light source into the first divided light and a second divided light, and guides the second divided light to the second reflector. The calculator is capable of calculating the reflection angle of the reflecting mirror by receiving the second divided light reflected by the second reflector.

    Abstract translation: 根据本发明的照明装置包括光源,反射镜,光学系统和计算器。 反射镜包括第一反射器和第二反射器,并且能够在改变反射角的同时将物体反射并引导到第一分开的光,所述第一分割光是来自所述光源的光的一部分 第一反射器 光学系统将来自光源的光分成第一分割光和第二分光,并将第二分光引导到第二反射器。 计算器能够通过接收由第二反射器反射的第二分割光来计算反射镜的反射角。

    Optical probe, attachable cover, and shape measuring apparatus
    2.
    发明授权
    Optical probe, attachable cover, and shape measuring apparatus 有权
    光学探针,可附接盖和形状测量装置

    公开(公告)号:US09255792B2

    公开(公告)日:2016-02-09

    申请号:US14612467

    申请日:2015-02-03

    Abstract: An optical probe includes a probe cover, within which is installed an optical system having an illuminating optical system and a receiving optical system. An emitting region and an incidence region through which light passes are provided to a bottom surface of the probe cover, the bottom surface forming an opposing region opposite a work piece. The bottom surface forms a surface where, of the light reflected from the work piece, light following a direct reflection direction is reflected in a direction moving away from the incidence region, from a position where light emitted from the emitting region is emitted at the work piece. Accordingly, an amount of second order reflected light striking the incidence region can be suppressed and, therefore, an occurrence of an erroneous value in received light distribution can be suppressed.

    Abstract translation: 光探头包括探针盖,在其中安装有具有照明光学系统和接收光学系统的光学系统。 发光区域和光通过的入射区域被提供到探针盖的底表面,底面形成与工件相对的相对区域。 底表面形成一个表面,其中从工件反射的光,沿着直接反射方向的光沿着从入射区域移开的方向从在发光区域发射的光在工作中发射的位置被反射 片。 因此,可以抑制入射入射区域的二次反射光的量,因此能够抑制接收光分布中的错误值的发生。

    Shape measuring apparatus
    4.
    发明授权

    公开(公告)号:US09989356B2

    公开(公告)日:2018-06-05

    申请号:US14197715

    申请日:2014-03-05

    CPC classification number: G01B11/24 G01B11/005 G01B11/25

    Abstract: A shape measuring apparatus includes: an irradiating part configured to irradiate work with a linear line laser, the irradiating part including: a light source configured to produce laser light; a first optical member configured to linearly spread the laser light from the light source and generate the line laser; and a second optical member, provided between the light source and the first optical member, configured to adjust an area of irradiation with a line laser on the work; a first sensor configured to receive a line laser reflected by the work and capture an image of the work; a lens configured to form an image of a line laser reflected by the work on an imaging surface of the first sensor; and a control part configured to control adjustment of the area of irradiation with the line laser on the work by the second optical member.

    Shape measuring apparatus
    5.
    发明授权

    公开(公告)号:US10852128B2

    公开(公告)日:2020-12-01

    申请号:US14184132

    申请日:2014-02-19

    Abstract: A shape measuring apparatus includes a first light source, a second light source, an optical system, an image capturer, and a controller. The first light source emits visible light. The second light source emits measurement light used in a measurement. The optical system emits the visible light and the measurement light at the same position on a work piece. The image capturer captures an image of the measurement light reflected by the work piece. The controller is configured to cause the emission of the visible light onto the work piece with the first light source when determining a measurement position, and to control the emission of the measurement light onto the work piece with the second light source when making the measurement.

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