Invention Grant
US09257411B2 Semiconductor device and method of embedding bumps formed on semiconductor die into penetrable adhesive layer to reduce die shifting during encapsulation
有权
半导体器件和将半导体裸片上形成的凸起嵌入可渗透的粘合剂层中以减少封装期间的晶片偏移的方法
- Patent Title: Semiconductor device and method of embedding bumps formed on semiconductor die into penetrable adhesive layer to reduce die shifting during encapsulation
- Patent Title (中): 半导体器件和将半导体裸片上形成的凸起嵌入可渗透的粘合剂层中以减少封装期间的晶片偏移的方法
-
Application No.: US14265782Application Date: 2014-04-30
-
Publication No.: US09257411B2Publication Date: 2016-02-09
- Inventor: Reza A. Pagaila , Yaojian Lin , JunMo Koo
- Applicant: STATS ChipPAC, Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC, Ltd.
- Current Assignee: STATS ChipPAC, Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L25/065 ; H01L21/56 ; H01L23/367 ; H01L23/538 ; H01L23/498 ; H01L23/522 ; H01L23/31

Abstract:
A semiconductor device has a semiconductor die with a plurality of bumps formed over a surface of the first semiconductor die. A penetrable adhesive layer is formed over a temporary carrier. The adhesive layer can include a plurality of slots. The semiconductor die is mounted to the carrier by embedding the bumps into the penetrable adhesive layer. The semiconductor die and interconnect structure can be separated by a gap. An encapsulant is deposited over the first semiconductor die. The bumps embedded into the penetrable adhesive layer reduce shifting of the first semiconductor die while depositing the encapsulant. The carrier is removed. An interconnect structure is formed over the semiconductor die. The interconnect structure is electrically connected to the bumps. A thermally conductive bump is formed over the semiconductor die, and a heat sink is mounted to the interconnect structure and thermally connected to the thermally conductive bump.
Public/Granted literature
Information query
IPC分类: