Invention Grant
- Patent Title: Bolometer and preparation method thereof
- Patent Title (中): 分光光度计及其制备方法
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Application No.: US14353020Application Date: 2012-07-25
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Publication No.: US09258894B2Publication Date: 2016-02-09
- Inventor: Jian Cai , Qian Wang , Ziyu Liu , Yang Hu
- Applicant: Jian Cai , Qian Wang , Ziyu Liu , Yang Hu
- Applicant Address: CN Beijing
- Assignee: Tsinghua University
- Current Assignee: Tsinghua University
- Current Assignee Address: CN Beijing
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Priority: CN201110319208 20111019
- International Application: PCT/CN2012/079126 WO 20120725
- International Announcement: WO2013/056582 WO 20130425
- Main IPC: G01J5/20
- IPC: G01J5/20 ; H01L27/14 ; H01L31/00 ; H05K1/11 ; G01J5/02 ; G01J5/00 ; H01L27/144 ; H01L31/02 ; G01J5/10 ; G01J5/24 ; H01L27/146 ; H01L21/683 ; H01L23/48
![Bolometer and preparation method thereof](/abs-image/US/2016/02/09/US09258894B2/abs.jpg.150x150.jpg)
Abstract:
A bolometer and a preparation method thereof. The bolometer includes: an infrared detection element (1) and a readout circuit (2), wherein the infrared detection element (1) is formed on one side of a first substrate (100), and an edge of the infrared detection element (1) is provided with an electrode hole (9), and the readout circuit (2) is formed on one side of a second substrate (200) and the readout circuit (2) has an electrode, the first substrate (100) is formed thereon with a silicon via (8) passing through the first substrate (100) and filed with a conductive material, the electrode hole (9) of the infrared detection element (1) is electrically connected to the electrode of the readout circuit (2) via the conductive material filled in the silicon via (8). The following defects are overcome: bolometers in the prior art need to flatten the silicon wafer surface with a suitable chemical-mechanical polishing process after a readout circuit thereof has been manufactured, the circuit is large in area, and the requirements of the system integration process are high.
Public/Granted literature
- US20150021479A1 BOLOMETER AND PREPARATION METHOD THEREOF Public/Granted day:2015-01-22
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