发明授权
US09263301B2 Semiconductor device and method of forming Fo-WLCSP with discrete semiconductor components mounted under and over semiconductor die
有权
用半导体芯片安装在分立半导体元件上形成Fo-WLCSP的半导体器件和方法
- 专利标题: Semiconductor device and method of forming Fo-WLCSP with discrete semiconductor components mounted under and over semiconductor die
- 专利标题(中): 用半导体芯片安装在分立半导体元件上形成Fo-WLCSP的半导体器件和方法
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申请号: US13607204申请日: 2012-09-07
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公开(公告)号: US09263301B2公开(公告)日: 2016-02-16
- 发明人: Reza A. Pagaila , Yaojian Lin , Jun Mo Koo
- 申请人: Reza A. Pagaila , Yaojian Lin , Jun Mo Koo
- 申请人地址: SG Singapore
- 专利权人: STARS ChipPAC, Ltd.
- 当前专利权人: STARS ChipPAC, Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Patent Law Group: Atkins and Associates, P.C.
- 代理商 Robert D. Atkins
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L21/56 ; H01L21/683 ; H01L23/00 ; H01L25/065 ; H01L25/00 ; H01L23/31 ; H01L23/50 ; H01L23/538
摘要:
A semiconductor die has first and second discrete semiconductor components mounted over a plurality of wettable contact pads formed on a carrier. Conductive pillars are formed over the wettable contact pads. A semiconductor die is mounted to the conductive pillars over the first discrete components. The conductive pillars provide vertical stand-off of the semiconductor die as headroom for the first discrete components. The second discrete components are disposed outside a footprint of the semiconductor die. Conductive TSV can be formed through the semiconductor die. An encapsulant is deposited over the semiconductor die and first and second discrete components. The wettable contact pads reduce die and discrete component shifting during encapsulation. A portion of a back surface of the semiconductor die is removed to reduce package thickness. An interconnect structure is formed over the encapsulant and semiconductor die. Third discrete semiconductor components can be mounted over the semiconductor die.
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