Invention Grant
- Patent Title: Packaging substrate and fabrication method thereof
- Patent Title (中): 包装基板及其制造方法
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Application No.: US14461828Application Date: 2014-08-18
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Publication No.: US09265154B2Publication Date: 2016-02-16
- Inventor: Shao-Tzu Tang , Chi-Ching Ho , Ying-Chou Tsai
- Applicant: Siliconware Precision Industries Co., Ltd.
- Applicant Address: TW Taichung
- Assignee: Siliconware Precision Industries Co., Ltd.
- Current Assignee: Siliconware Precision Industries Co., Ltd.
- Current Assignee Address: TW Taichung
- Agency: Mintz Levin Cohn Ferris Glovsky and Popeo, P.C.
- Agent Peter F. Corless; Steven M. Jensen
- Priority: TW103114466A 20140422
- Main IPC: H01L21/8242
- IPC: H01L21/8242 ; H05K1/18 ; H05K1/11 ; H05K3/10 ; H01L49/02

Abstract:
A fabrication method of a packaging substrate is provided, which includes the steps of: forming first conductive portions on a carrier; sequentially forming a conductive post and an alignment layer on each of the first conductive portions; forming an encapsulant on the carrier for encapsulating the first conductive portions, the conductive posts and the alignment layers; forming a conductive via on each of the alignment layers in the encapsulant and forming second conductive portions on the conductive vias and the encapsulant; and removing the carrier. Each of the first conductive portions and the corresponding conductive post, the alignment layer and the conductive via form a conductive structure. The alignment layer has a vertical projection area larger than those of the conductive post and the conductive via to thereby reduce the size of the conductive post and the conductive via, thus increasing the wiring density and the electronic element mounting density.
Public/Granted literature
- US20150305162A1 PACKAGING SUBSTRATE AND FABRICATION METHOD THEREOF Public/Granted day:2015-10-22
Information query
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