Invention Grant
- Patent Title: Hybrid integrated component
- Patent Title (中): 混合集成组件
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Application No.: US14059202Application Date: 2013-10-21
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Publication No.: US09266720B2Publication Date: 2016-02-23
- Inventor: Johannes Classen , Axel Franke , Jens Frey , Heribert Weber , Frank Fischer , Patrick Wellner , Mirko Hattass , Daniel Christoph Meisel
- Applicant: Johannes Classen , Axel Franke , Jens Frey , Heribert Weber , Frank Fischer , Patrick Wellner , Mirko Hattass , Daniel Christoph Meisel
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102012219550 20121025
- Main IPC: B81C1/00
- IPC: B81C1/00

Abstract:
A component has at least one MEMS element and at least one cap made of a semiconductor material. The cap, in addition to its mechanical function as a terminus of a cavity and protection of the micromechanical structure, is provided with an electrical functionality. The micromechanical structure of the MEMS element of the component is situated in a cavity between a carrier and the cap, and includes at least one structural element which is deflectable out of the component plane within the cavity. The cap includes at least one section extending over the entire thickness of the cap, which is electrically insulated from the adjoining semiconductor material in such a way that it may be electrically contacted independently from the remaining sections of the cap.
Public/Granted literature
- US20140117475A1 HYBRID INTEGRATED COMPONENT Public/Granted day:2014-05-01
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