发明授权
- 专利标题: High-speed multi-frame dynamic transmission electron microscope image acquisition system with arbitrary timing
- 专利标题(中): 高速多帧动态透射电子显微镜图像采集系统随意定时
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申请号: US14653138申请日: 2014-02-14
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公开(公告)号: US09269527B2公开(公告)日: 2016-02-23
- 发明人: Bryan W. Reed , William J. DeHope , Glenn Huete , Thomas B. LaGrange , Richard M. Shuttlesworth
- 申请人: Lawrence Livermore National Security, LLC
- 申请人地址: US CA Livermore
- 专利权人: Lawrence Livermore National Security, LLC
- 当前专利权人: Lawrence Livermore National Security, LLC
- 当前专利权人地址: US CA Livermore
- 代理机构: Harness, Dickey & Pierce, PLC
- 国际申请: PCT/US2014/016566 WO 20140214
- 国际公布: WO2014/100835 WO 20140626
- 主分类号: H01J37/075
- IPC分类号: H01J37/075 ; H01J37/073 ; H01J37/21 ; H01J37/10 ; H01J37/147
摘要:
An electron microscope is disclosed which has a laser-driven photocathode and an arbitrary waveform generator (AWG) laser system (“laser”). The laser produces a train of temporally-shaped laser pulses each being of a programmable pulse duration, and directs the laser pulses to the laser-driven photocathode to produce a train of electron pulses. An image sensor is used along with a deflector subsystem. The deflector subsystem is arranged downstream of the target but upstream of the image sensor, and has a plurality of plates. A control system having a digital sequencer controls the laser and a plurality of switching components, synchronized with the laser, to independently control excitation of each one of the deflector plates. This allows each electron pulse to be directed to a different portion of the image sensor, as well as to enable programmable pulse durations and programmable inter-pulse spacings.
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