Integrated circuits and methods of forming integrated circuits are provided. An integrated circuit includes a gate electrode structure overlying a base substrate. The gate electrode structure includes a gate electrode, with a cap disposed over the gate electrode and sidewall spacers disposed adjacent to sidewalls of the gate electrode structure. A source and drain region are formed in the base substrate aligned with the gate electrode structure. A first dielectric layer is disposed adjacent to the sidewall spacers. The sidewall spacers and the cap have recessed surfaces below a top surface of the first dielectric layer, and a protecting layer is disposed over the recessed surfaces. A second dielectric layer is disposed over the first dielectric layer and the protecting layer. Electrical interconnects are disposed through the first dielectric layer and the second dielectric layer, and the electrical interconnects are in electrical communication with the respective source and drain regions.