Invention Grant
US09275896B2 Methods for fabricating integrated circuits using directed self-assembly 有权
使用定向自组装制造集成电路的方法

Methods for fabricating integrated circuits using directed self-assembly
Abstract:
Methods for fabricating integrated circuits are provided. In one example, a method for fabricating an integrated circuit includes forming a graphoepitaxy DSA directing confinement well using a sidewall of an etch layer that overlies a semiconductor substrate. The graphoepitaxy DSA directing confinement well is filled with a block copolymer. The block copolymer is phase separated into an etchable phase and an etch resistant phase. The etchable phase is etched while leaving the etch resistant phase substantially in place to define an etch mask with a nanopattern. The nanopattern is transferred to the etch layer.
Information query
Patent Agency Ranking
0/0