Invention Grant
US09279822B2 Micromechanical structure and method for manufacturing a micromechanical structure 有权
微机械结构的微机械结构和制造方法

Micromechanical structure and method for manufacturing a micromechanical structure
Abstract:
A micromechanical structure includes: a substrate which has a main plane of extension; and a mass which is movable relative to the substrate, the movable mass being elastically suspended via at least one coupling spring. A first subregion of the movable mass is situated, at least partially, between the substrate and the coupling spring along a vertical direction which is essentially perpendicular to the main plane of extension.
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