Invention Grant
- Patent Title: Micromechanical structure and method for manufacturing a micromechanical structure
- Patent Title (中): 微机械结构的微机械结构和制造方法
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Application No.: US13742560Application Date: 2013-01-16
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Publication No.: US09279822B2Publication Date: 2016-03-08
- Inventor: Johannes Classen
- Applicant: Johannes Classen
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102012200929 20120123
- Main IPC: G01P15/02
- IPC: G01P15/02 ; G01C19/5747 ; G01P15/08 ; G01P15/125 ; G01C19/5769

Abstract:
A micromechanical structure includes: a substrate which has a main plane of extension; and a mass which is movable relative to the substrate, the movable mass being elastically suspended via at least one coupling spring. A first subregion of the movable mass is situated, at least partially, between the substrate and the coupling spring along a vertical direction which is essentially perpendicular to the main plane of extension.
Public/Granted literature
- US20130186200A1 MICROMECHANICAL STRUCTURE AND METHOD FOR MANUFACTURING A MICROMECHANICAL STRUCTURE Public/Granted day:2013-07-25
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