Invention Grant
- Patent Title: Color filter layer and method of fabricating the same
- Patent Title (中): 滤色层及其制造方法
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Application No.: US13850297Application Date: 2013-03-26
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Publication No.: US09279923B2Publication Date: 2016-03-08
- Inventor: Cheng-Hung Yu
- Applicant: UNITED MICROELECTRONICS CORPORATION
- Applicant Address: TW Hsinchu
- Assignee: UNITED MICROELECTRONICS CORPORATION
- Current Assignee: UNITED MICROELECTRONICS CORPORATION
- Current Assignee Address: TW Hsinchu
- Agent Ding Yu Tan
- Main IPC: G02B5/22
- IPC: G02B5/22 ; G02B5/20 ; G03F7/00

Abstract:
A method for fabricating a color filter layer, which is applied to an integrated circuit manufacturing process, includes the following steps. Firstly, a substrate is provided, and a groove structure is formed on the substrate. The groove structure includes a plurality of positive photoresist patterns and a plurality of trenches. Then, a first group of color filter patterns is formed in the trenches. The plurality of positive photoresist patterns is removed, so that a portion of a top surface of the substrate is exposed. Then, a second group of color filter patterns is formed on the exposed top surface of the substrate.
Public/Granted literature
- US20140293469A1 COLOR FILTER LAYER AND METHOD OF FABRICATING THE SAME Public/Granted day:2014-10-02
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