发明授权
- 专利标题: Phase change memory stack with treated sidewalls
- 专利标题(中): 具有处理侧壁的相变存储器堆叠
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申请号: US14266365申请日: 2014-04-30
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公开(公告)号: US09281471B2公开(公告)日: 2016-03-08
- 发明人: Yongjun Jeff Hu , Tsz W. Chan , Swapnil Lengade , Everett Allen McTeer , Shu Qin
- 申请人: Micron Technology, Inc.
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Schwegman Lundberg & Woessner, P.A.
- 主分类号: H01L47/00
- IPC分类号: H01L47/00 ; H01L45/00 ; H01L27/24
摘要:
Memory devices and methods for fabricating memory devices have been disclosed. One such memory device includes a first electrode material formed on a word line material. A selector device material is formed on the first electrode material. A second electrode material is formed on the selector device material. A phase change material is formed on the second electrode material. A third electrode material is formed on the phase change material. An adhesion species is plasma doped into sidewalls of the memory stack and a liner material is formed on the sidewalls of the memory stack. The adhesion species intermixes with an element of the memory stack and the sidewall liner to terminate unsatisfied atomic bonds of the element and the sidewall liner.
公开/授权文献
- US20150318467A1 PHASE CHANGE MEMORY STACK WITH TREATED SIDEWALLS 公开/授权日:2015-11-05
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