Invention Grant
US09293320B2 Liquid treatment apparatus and method and non-transitory storage medium
有权
液体处理装置及方法及非暂时性储存介质
- Patent Title: Liquid treatment apparatus and method and non-transitory storage medium
- Patent Title (中): 液体处理装置及方法及非暂时性储存介质
-
Application No.: US13865311Application Date: 2013-04-18
-
Publication No.: US09293320B2Publication Date: 2016-03-22
- Inventor: Yuichi Yoshida , Kousuke Yoshihara
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Minato-Ku
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Minato-Ku
- Agency: Burr & Brown, PLLC
- Priority: JP2012-098079 20120423
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/67 ; G03F7/16 ; G03F7/30 ; G03F7/32
Abstract:
A liquid treatment method includes: supplying a first organic solvent to a substrate with the substrate being held horizontally by a substrate holder; and thereafter supplying a second organic solvent to a substrate held by the substrate holder, the second solvent having a higher cleanliness than the first solvent.
Public/Granted literature
- US20130280425A1 LIQUID TREATMENT APPARATUS AND METHOD AND NON-TRANSITORY STORAGE MEDIUM Public/Granted day:2013-10-24
Information query
IPC分类:
