发明授权
US09293353B2 Faraday shield having plasma density decoupling structure between TCP coil zones
有权
法拉第屏蔽层具有TCP线圈区域之间的等离子体密度去耦结构
- 专利标题: Faraday shield having plasma density decoupling structure between TCP coil zones
- 专利标题(中): 法拉第屏蔽层具有TCP线圈区域之间的等离子体密度去耦结构
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申请号: US13658652申请日: 2012-10-23
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公开(公告)号: US09293353B2公开(公告)日: 2016-03-22
- 发明人: Maolin Long , Alex Paterson , Ricky Marsh , Ying Wu , John Drewery
- 申请人: Maolin Long , Alex Paterson , Ricky Marsh , Ying Wu , John Drewery
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 代理机构: Martine Penilla Group, LLP
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; H01L21/306 ; H01L21/67 ; H05K9/00 ; H01J37/32
摘要:
A Faraday shield and a plasma processing chamber incorporating the Faraday shield is are provided. The plasma chamber includes an electrostatic chuck for receiving a substrate, a dielectric window connected to a top portion of the chamber, the dielectric window disposed over the electrostatic chuck, and a Faraday shield. The Faraday shield is disposed inside of the chamber and defined between the electrostatic chuck and the dielectric window. The Faraday shield includes an inner zone having an inner radius range that includes a first and second plurality of slots and an outer zone having an outer radius range that includes a third plurality of slots. The inner zone is adjacent to the outer zone. The Faraday shield also includes a band ring separating the inner zone and the outer zone, such that the first and second plurality of slots do not connect with the third plurality of slots.
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