Invention Grant
- Patent Title: Formation of alpha particle shields in chip packaging
- Patent Title (中): 在芯片封装中形成α粒子屏蔽
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Application No.: US14519235Application Date: 2014-10-21
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Publication No.: US09299665B2Publication Date: 2016-03-29
- Inventor: Paul S. Andry , Cyril Cabral, Jr. , Kenneth P. Rodbell , Robert L. Wisnieff
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Main IPC: H01L23/556
- IPC: H01L23/556 ; H01L23/00 ; H01L21/304 ; H01L21/48

Abstract:
A structure fabrication method. An integrated circuit that includes N chip electric pads is bonded to a top side of an interposing shield that includes N electric conductors. N is at least 2. The interposing shield includes a shield material that includes a first semiconductor material. A bottom side of the interposing shield is polished, which exposes the N electric conductors to a surrounding ambient. The bonding includes bonding the integrated circuit to the top side of the interposing shield such that the N chip electric pads are in electrical contact and direct physical contact with corresponding electrical pads of the N electric conductors. The shield material covers the N electric conductors in a manner that the N electric conductors are not exposed to the surrounding ambient. The polishing removes a sufficient amount of the shield material to expose the N electric conductors to the surrounding ambient.
Public/Granted literature
- US20150171023A1 FORMATION OF ALPHA PARTICLE SHIELDS IN CHIP PACKAGING Public/Granted day:2015-06-18
Information query
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