Invention Grant
US09299738B1 Interposer based imaging sensor for high-speed image acquisition and inspection systems
有权
基于内插器的成像传感器,用于高速图像采集和检测系统
- Patent Title: Interposer based imaging sensor for high-speed image acquisition and inspection systems
- Patent Title (中): 基于内插器的成像传感器,用于高速图像采集和检测系统
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Application No.: US14299749Application Date: 2014-06-09
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Publication No.: US09299738B1Publication Date: 2016-03-29
- Inventor: David L. Brown , Guowu Zheng , Yung-Ho Alex Chuang , Venkatraman Iyer
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G01T1/20
- IPC: G01T1/20 ; H01L27/146 ; H04N5/335

Abstract:
The present invention includes an interposer disposed on a surface of a substrate, a light sensing array sensor disposed on the interposer, the light sensing array sensor being back-thinned and configured for back illumination, the light sensing array sensor including columns of pixels, one or more amplification circuitry elements configured to amplify an output of the light sensing array sensor, the amplification circuits being operatively connected to the interposer, one or more analog-to-digital conversion circuitry elements configured to convert an output of the light sensing array sensor to a digital signal, the ADC circuitry elements being operatively connected to the interposer, one or more driver circuitry elements configured to drive a clock or control signal of the array sensor, the interposer configured to electrically couple at least two of the light sensing array sensor, the amplification circuits, the conversion circuits, the driver circuits, or one or more additional circuits.
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