Invention Grant
US09299781B2 Semiconductor devices with contact structures and a gate structure positioned in trenches formed in a layer of material
有权
具有接触结构的半导体器件和位于形成在材料层中的沟槽中的栅极结构
- Patent Title: Semiconductor devices with contact structures and a gate structure positioned in trenches formed in a layer of material
- Patent Title (中): 具有接触结构的半导体器件和位于形成在材料层中的沟槽中的栅极结构
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Application No.: US14242416Application Date: 2014-04-01
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Publication No.: US09299781B2Publication Date: 2016-03-29
- Inventor: Ruilong Xie , William J. Taylor, Jr. , Ryan Ryoung-Han Kim
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/08
- IPC: H01L29/08 ; H01L29/417 ; H01L29/423 ; H01L29/51 ; H01L29/78

Abstract:
One illustrative device disclosed herein includes, among other things, an active region defined in a semiconductor substrate, a layer of material positioned above the substrate, a plurality of laterally spaced-apart source/drain trenches formed in the layer of material above the active region, a conductive source/drain contact structure formed within each of the source/drain trenches, a gate trench formed at least partially in the layer of material between the spaced-apart source/drain trenches in the layer of material, wherein portions of the layer of material remain positioned between the source/drain trenches and the gate trench, a gate structure positioned within the gate trench, and a gate cap layer positioned above the gate structure.
Public/Granted literature
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