Invention Grant
- Patent Title: Lapping head with a sensor device on the rotating lapping head
- Patent Title (中): 在旋转的研磨头上用传感器装置研磨头
-
Application No.: US14057368Application Date: 2013-10-18
-
Publication No.: US09308622B2Publication Date: 2016-04-12
- Inventor: Leping Li , Andrew S. Menz , John F. Schmidt , Stephen J. Mackin
- Applicant: Seagate Technology LLC
- Applicant Address: US CA Cupertino
- Assignee: Seagate Technology LLC
- Current Assignee: Seagate Technology LLC
- Current Assignee Address: US CA Cupertino
- Agency: Westman, Champlin & Koehler, P.A.
- Main IPC: B24B49/10
- IPC: B24B49/10 ; B24B37/013 ; B24B37/04 ; B24B49/12

Abstract:
The application discloses embodiments of a lapping head including a sensor device in the base structure of the rotating lapping head. For operation, rotation is imparted to the lapping head through a drive motor coupled to the lapping head through a rotating shaft. As disclosed, the sensor device is electrically connected to one or more electronic components or circuitry through the rotating shaft and a rotating electrical connector coupled to the rotating shaft. In embodiments disclosed, the sensor device is an eddy current sensor configured to measure a gap dimension between a sensor element on the lapping head and a conductive platen to provide an in-situs measurement of workpiece thickness.
Public/Granted literature
- US20150111468A1 Lapping Head with a Sensor Device on the Rotating Lapping Head Public/Granted day:2015-04-23
Information query