发明授权
US09316929B2 EUV exposure apparatus with reflective elements having reduced influence of temperature variation
有权
具有降低的温度变化影响的反射元件的EUV曝光装置
- 专利标题: EUV exposure apparatus with reflective elements having reduced influence of temperature variation
- 专利标题(中): 具有降低的温度变化影响的反射元件的EUV曝光装置
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申请号: US13754720申请日: 2013-01-30
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公开(公告)号: US09316929B2公开(公告)日: 2016-04-19
- 发明人: Norman Baer , Ulrich Loering , Oliver Natt , Gero Wittich , Timo Laufer , Peter Kuerz , Guido Limbach , Stefan Hembacher , Holger Walter , Yim-Bun-Patrick Kwan , Markus Hauf , Franz-Josef Stickel , Jan Van Schoot
- 申请人: Carl Zeiss SMT GmbH , ASML Netherlands B.V.
- 申请人地址: DE Oberkochen NL Veldhoven
- 专利权人: Carl Zeiss SMT GmbH,ASML Netherlands B.V.
- 当前专利权人: Carl Zeiss SMT GmbH,ASML Netherlands B.V.
- 当前专利权人地址: DE Oberkochen NL Veldhoven
- 代理机构: Walter Ottesen P.A.
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; B82Y10/00 ; G02B5/08 ; G02B7/18 ; G02B17/06 ; G02B27/00 ; G21K1/06 ; G02B3/00 ; G02B5/00 ; G03B27/54
摘要:
A projection lens of an EUV-lithographic projection exposure system with at least two reflective optical elements each comprising a body and a reflective surface for projecting an object field on a reticle onto an image field on a substrate if the projection lens is exposed with an exposure power of EUV light, wherein the bodies of at least two reflective optical elements comprise a material with a temperature dependent coefficient of thermal expansion which is zero at respective zero cross temperatures, and wherein the absolute value of the difference between the zero cross temperatures is more than 6K.
公开/授权文献
- US20130141707A1 EUV Exposure Apparatus 公开/授权日:2013-06-06
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