Invention Grant
- Patent Title: Self-aligned top contact for MRAM fabrication
- Patent Title (中): 用于MRAM制造的自对准顶部接触
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Application No.: US14195566Application Date: 2014-03-03
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Publication No.: US09318696B2Publication Date: 2016-04-19
- Inventor: Yu Lu , Xia Li , Seung Hyuk Kang , Shiqun Gu
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM INCORPORATED
- Current Assignee: QUALCOMM INCORPORATED
- Current Assignee Address: US CA San Diego
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L43/12 ; H01L43/08 ; H01L43/02 ; H01L27/22

Abstract:
Systems and methods for forming precise and self-aligned top metal contact for a Magnetoresistive random-access memory (MRAM) device include forming a magnetic tunnel junction (MTJ) in a common interlayer metal dielectric (IMD) layer with a logic element. A low dielectric constant (K) etch stop layer is selectively retained over an exposed top surface of the MTJ. Etching is selectively performed through a top IMD layer formed over the low K etch stop layer and the common IMD layer, based on a first chemistry which prevents etching through the low K etch stop layer. By switching chemistry to a second chemistry which precisely etches through the low K etch stop layer, an opening is created for forming a self-aligned top contact to the exposed top surface of the MTJ.
Public/Granted literature
- US20150249209A1 SELF-ALIGNED TOP CONTACT FOR MRAM FABRICATION Public/Granted day:2015-09-03
Information query
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