Invention Grant
- Patent Title: Methods and systems for cleaning needles of a probe card
- Patent Title (中): 用于清洁探针卡针的方法和系统
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Application No.: US13749066Application Date: 2013-01-24
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Publication No.: US09322849B2Publication Date: 2016-04-26
- Inventor: Do-Yun Kim , In-Seok Hwang , Sang-Boo Kang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel & Sibley, P.A.
- Priority: KR10-2012-0011904 20120206
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R1/073 ; G01R3/00

Abstract:
A method of cleaning needles of a probe card in a test system includes mounting the probe card, which has a plurality of device under tests (DUTs) and needles, in a card mounting part. The DUTs and needles are scanned using a camera positioned in the test system to provide a scan result. A laser beam is focused on at least one of the needles based on the scan result and the laser beam is irradiated on the at least one of the needles to clean the at least one of the needles.
Public/Granted literature
- US20130200914A1 Methods and Systems for Cleaning Needles of a Probe Card Public/Granted day:2013-08-08
Information query