Invention Grant
US09322849B2 Methods and systems for cleaning needles of a probe card 有权
用于清洁探针卡针的方法和系统

Methods and systems for cleaning needles of a probe card
Abstract:
A method of cleaning needles of a probe card in a test system includes mounting the probe card, which has a plurality of device under tests (DUTs) and needles, in a card mounting part. The DUTs and needles are scanned using a camera positioned in the test system to provide a scan result. A laser beam is focused on at least one of the needles based on the scan result and the laser beam is irradiated on the at least one of the needles to clean the at least one of the needles.
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