发明授权
- 专利标题: Methanofullerenes
-
申请号: US14187649申请日: 2014-02-24
-
公开(公告)号: US09323149B2公开(公告)日: 2016-04-26
- 发明人: Alex Philip Graham Robinson , Jon Andrew Preece , Richard Edward Palmer , Andreas Frommhold , Dongxu Yang , Alexandra McClelland , Drew Athans , Xiang Xue
- 申请人: Alex Philip Graham Robinson , Jon Andrew Preece , Richard Edward Palmer , Andreas Frommhold , Dongxu Yang , Alexandra McClelland , Drew Athans , Xiang Xue
- 申请人地址: GB Swansea, Wales
- 专利权人: IRRESISTIBLE MATERIALS LTD
- 当前专利权人: IRRESISTIBLE MATERIALS LTD
- 当前专利权人地址: GB Swansea, Wales
- 代理机构: The Patent Practice of Szmanda & Shenut, LLC
- 代理商 James G. Shenut; Charles R. Szmanda
- 主分类号: G03F7/039
- IPC分类号: G03F7/039 ; G03F7/038 ; G03F7/20 ; G03F7/38
摘要:
The present disclosure relates to novel methanofullerene derivatives, negative-type photoresist compositions prepared therefrom and methods of using them. The derivatives, their photoresist compositions and the methods are ideal for fine pattern processing using, for example, ultraviolet radiation, beyond extreme ultraviolet radiation, extreme ultraviolet radiation, X-rays and charged particle rays. Negative photosensitive compositions are also disclosed.
公开/授权文献
- US20140255849A1 Methanofullerenes 公开/授权日:2014-09-11
信息查询
IPC分类: