Invention Grant
US09331007B2 Semiconductor device and method of forming conductive ink layer as interconnect structure between semiconductor packages
有权
形成导电油墨层作为半导体封装之间的互连结构的半导体器件和方法
- Patent Title: Semiconductor device and method of forming conductive ink layer as interconnect structure between semiconductor packages
- Patent Title (中): 形成导电油墨层作为半导体封装之间的互连结构的半导体器件和方法
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Application No.: US13653242Application Date: 2012-10-16
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Publication No.: US09331007B2Publication Date: 2016-05-03
- Inventor: Insang Yoon , Flynn Carson , Il Kwon Shim , SeongHun Mun
- Applicant: STATS ChipPAC, Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC, Ltd.
- Current Assignee: STATS ChipPAC, Ltd.
- Current Assignee Address: SG Singapore
- Agency: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L21/48 ; H01L23/498 ; H01L23/538 ; H01L25/10 ; H01L21/56 ; H01L23/00

Abstract:
A semiconductor device has a semiconductor die with an encapsulant deposited over and around the semiconductor die. An opening is formed in a first surface of the encapsulant by etching or LDA. A plurality of bumps is optionally formed over the semiconductor die. A bump is recessed within the opening of the encapsulant. A conductive ink is formed over the first surface of the encapsulant, bump and sidewall of the opening. The conductive ink can be applied by a printing process. An interconnect structure is formed over a second surface of the encapsulant opposite the first surface of the encapsulant. The interconnect structure is electrically connected to the semiconductor die. A semiconductor package is disposed over the first surface of the encapsulant with a plurality of bumps electrically connected to the conductive ink layer. The semiconductor package may contain a memory device.
Public/Granted literature
Information query
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