Invention Grant
- Patent Title: Device with suspended beam and piezoresistive means of detecting displacement of the beam and method of manufacturing the device
- Patent Title (中): 具有悬挂梁和压阻的装置，用于检测梁的位移和制造装置的方法
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Application No.: US13821701Application Date: 2011-09-09
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Publication No.: US09331606B2Publication Date: 2016-05-03
- Inventor: Sebastien Hentz , Philippe Andreucci , Eric Colinet , Laurent Duraffourg , Sebastien Labarthe
- Applicant: Sebastien Hentz , Philippe Andreucci , Eric Colinet , Laurent Duraffourg , Sebastien Labarthe
- Applicant Address: FR Paris
- Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1057249 20100913
- International Application: PCT/EP2011/065687 WO 20110909
- International Announcement: WO2012/034951 WO 20120322
- Main IPC: G01L1/00
- IPC: G01L1/00 ; G01B7/16 ; H02N2/18 ; H03H9/02 ; H03H9/24 ; B81B3/00 ; H02N2/00
Abstract:
A device with a suspended beam and piezoresistive means of detecting displacement of the beam and a method of manufacturing the device are disclosed. The device comprises a support, a suspended beam, moving parallel to the plane of the support, and means of detecting displacement, comprising at least two piezoresistive strain gauges that are not in line with each other. The beam is suspended through detection means. The two gauges are located on two opposite lateral faces of the beam respectively.
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