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1.发明申请DEVICE WITH SUSPENDED BEAM AND PIEZORESISTIVE MEANS OF DETECTING DISPLACEMENT OF THE BEAM AND METHOD OF MANUFACTURING THE DEVICE 有权具有悬挂梁的装置和用于检测梁的位移的伪装置和制造装置的方法公开(公告)号：US20130214644A1
公开(公告)日：2013-08-22
申请号：US13821701
申请日：2011-09-09
Applicant: Sebastien Hentz , Philippe Andreucci , Eric Colinet , Laurent Duraffourg , Sebastien Labarthe
Inventor： Sebastien Hentz , Philippe Andreucci , Eric Colinet , Laurent Duraffourg , Sebastien Labarthe
CPC classification number: H02N2/18 , B81B3/0086 , B81B2201/0271 , B81B2203/0109 , H02N2/22 , H03H9/02259 , H03H9/2405 , H03H2009/0244 , H03H2009/02496 , Y10T29/42
Abstract: A device with a suspended beam and piezoresistive means of detecting displacement of the beam and a method of manufacturing the device are disclosed. The device comprises a support, a suspended beam, moving parallel to the plane of the support, and means of detecting displacement, comprising at least two piezoresistive strain gauges that are not in line with each other. The beam is suspended through detection means. The two gauges are located on two opposite lateral faces of the beam respectively.
Abstract translation: 公开了一种具有悬挂梁的装置和用于检测梁的位移的压阻装置和制造该装置的方法。 该装置包括支撑件，悬挂梁，平行于支撑件的平面移动，以及检测位移的装置，包括至少两个彼此不一致的压阻应变计。 光束通过检测装置悬挂。 两个量规分别位于梁的两个相对的侧面上。
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2.发明授权Device with suspended beam and piezoresistive means of detecting displacement of the beam and method of manufacturing the device 有权具有悬挂梁和压阻的装置，用于检测梁的位移和制造装置的方法公开(公告)号：US09331606B2
公开(公告)日：2016-05-03
申请号：US13821701
申请日：2011-09-09
Applicant: Sebastien Hentz , Philippe Andreucci , Eric Colinet , Laurent Duraffourg , Sebastien Labarthe
Inventor： Sebastien Hentz , Philippe Andreucci , Eric Colinet , Laurent Duraffourg , Sebastien Labarthe
CPC classification number: H02N2/18 , B81B3/0086 , B81B2201/0271 , B81B2203/0109 , H02N2/22 , H03H9/02259 , H03H9/2405 , H03H2009/0244 , H03H2009/02496 , Y10T29/42
Abstract: A device with a suspended beam and piezoresistive means of detecting displacement of the beam and a method of manufacturing the device are disclosed. The device comprises a support, a suspended beam, moving parallel to the plane of the support, and means of detecting displacement, comprising at least two piezoresistive strain gauges that are not in line with each other. The beam is suspended through detection means. The two gauges are located on two opposite lateral faces of the beam respectively.
Abstract translation: 公开了一种具有悬挂梁的装置和用于检测梁的位移的压阻装置和制造该装置的方法。 该装置包括支撑件，悬挂梁，平行于支撑件的平面移动，以及检测位移的装置，包括至少两个彼此不一致的压阻应变计。 光束通过检测装置悬挂。 两个量规分别位于梁的两个相对的侧面上。
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