发明授权
- 专利标题： Method and apparatus for massively parallel multi-wafer test
- 专利标题（中）： 用于大规模并行多晶片测试的方法和装置
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申请号： US13609154申请日： 2012-09-10
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公开(公告)号： US09335347B2公开(公告)日： 2016-05-10
- 发明人: John W. Andberg , Ira H. Leventhal , Matthew W. Losey , Yohannes Desta , Lakshmikanth Namburi , Vincent E. Lopopolo , Sanjeev Grover , Erik Volkerink
- 申请人： John W. Andberg , Ira H. Leventhal , Matthew W. Losey , Yohannes Desta , Lakshmikanth Namburi , Vincent E. Lopopolo , Sanjeev Grover , Erik Volkerink
- 申请人地址： JP Tokyo
- 专利权人： ADVANTEST CORPORATION
- 当前专利权人： ADVANTEST CORPORATION
- 当前专利权人地址： JP Tokyo
- 主分类号： G01R31/28
- IPC分类号： G01R31/28 ; G01R1/04 ; G01R1/073 ; G01R35/00
摘要：
Disclosed herein is a cost effective, efficient, massively parallel multi-wafer test cell. Additionally, this test cell can be used for both single-touchdown and multiple-touchdown applications. The invention uses a novel “split-cartridge” design, combined with a method for aligning wafers when they are separated from the probe card assembly, to create a cost effective, efficient multi-wafer test cell. A “probe-card stops” design may be used within the cartridge to simplify the overall cartridge design and operation.
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