发明授权
- 专利标题: Process to form aqueous precursor and aluminum oxide film
- 专利标题(中): 形成水性前体和氧化铝膜的方法
-
申请号: US13703592申请日: 2011-06-14
-
公开(公告)号: US09340678B2公开(公告)日: 2016-05-17
- 发明人: Douglas A. Keszler , Wei Wang
- 申请人: Douglas A. Keszler , Wei Wang
- 申请人地址: US OR Corvallis
- 专利权人: State of Oregon acting by and through the State Board of Higher Education on behalf of Oregon State University
- 当前专利权人: State of Oregon acting by and through the State Board of Higher Education on behalf of Oregon State University
- 当前专利权人地址: US OR Corvallis
- 代理机构: Klarquist Sparkman, LLP
- 国际申请: PCT/US2011/040307 WO 20110614
- 国际公布: WO2011/159675 WO 20111222
- 主分类号: B05D5/12
- IPC分类号: B05D5/12 ; C09D1/00 ; H01L31/0216 ; H01L31/18 ; C23C18/12
摘要:
One disclosed embodiment concerns an aqueous inorganic coating precursor solution comprising a mixture of water, polynuclear aluminum hydroxide cations, and polyatomic ligands selected from nitrate (NO3−), nitrite (NO2−), or combinations thereof. In certain embodiments, the composition has a molar concentration ratio of polyatomic ligands to aluminum of less than 3; an aluminum cation concentration of from about 0.01 M to about 3.5 M; and/or a polyatomic anion concentration of from about 0.1 to about 2.5 times the aluminum cation concentration. Embodiments of a method for forming the precursor solution also are disclosed. For example, certain embodiments comprise adding a metal having a sufficient reduction potential to reduce nitric acid to an aqueous solution comprising aluminum nitrate (Al(NO3)3).
公开/授权文献
信息查询