Invention Grant
US09341650B2 Space transformer having a ceramic substrate with a wiring pattern for use in a probe card
有权
具有陶瓷基板的空间变换器，具有用于探针卡的布线图案
- Patent Title: Space transformer having a ceramic substrate with a wiring pattern for use in a probe card
- Patent Title (中): 具有陶瓷基板的空间变换器，具有用于探针卡的布线图案
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Application No.: US14373229Application Date: 2013-01-15
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Publication No.: US09341650B2Publication Date: 2016-05-17
- Inventor: Naoki Endo , Noriyoshi Kaneda , Shinya Miyaji
- Applicant: NHK Spring Co., Ltd.
- Applicant Address: JP Yokohama-shi
- Assignee: NHK Spring Co., Ltd.
- Current Assignee: NHK Spring Co., Ltd.
- Current Assignee Address: JP Yokohama-shi
- Agency: Locke Lord LLP
- Priority: JP2012-008505 20120118
- International Application: PCT/JP2013/050593 WO 20130115
- International Announcement: WO2013/108759 WO 20130725
- Main IPC: G01R1/067
- IPC: G01R1/067 ; G01R1/073 ; G01R31/28
Abstract:
A space transformer includes: a ceramic substrate that contains enstatite and boron nitride as components; a through hole running through in a thickness direction with respect to a sintered body in which the boron nitride is oriented in one direction; conductive material provided inside the through hole; and a wiring pattern including a plurality of electrodes provided on each of two principal surfaces, wherein a wiring pitch in the wiring pattern on one principal surface is different from a wiring pitch in the wiring pattern on the other principal surface.
Public/Granted literature
- US20150002180A1 SPACE TRANSFORMER AND PROBE CARD Public/Granted day:2015-01-01
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