发明授权
- 专利标题： Methods for characterizing carbon overcoat
- 专利标题（中）： 表征碳外涂层的方法
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申请号： US13490214申请日： 2012-06-06
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公开(公告)号： US09343275B1公开(公告)日： 2016-05-17
- 发明人: Lifan Chen , Haifeng Wang , Liang Hong , Nattaporn Khamnualthong
- 申请人： Lifan Chen , Haifeng Wang , Liang Hong , Nattaporn Khamnualthong
- 申请人地址： US CA Fremont
- 专利权人： Western Digital (Fremont), LLC
- 当前专利权人： Western Digital (Fremont), LLC
- 当前专利权人地址： US CA Fremont
- 主分类号： H01J37/07
- IPC分类号： H01J37/07 ; H01J37/244 ; H01J49/04 ; H01J49/00
摘要：
A method for characterizing a carbon overcoat is provided. The method includes performing electron energy loss spectroscopy (EELS) spectrum imaging for an area of a preselected carbon-based material and an area of the carbon overcoat to generate a reference EELS dataset and a carbon overcoat EELS dataset, respectively, and determining a carbon bonding content of the carbon overcoat based on the reference EELS dataset and the carbon overcoat EELS dataset.
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