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公开(公告)号:US09343275B1
公开(公告)日:2016-05-17
申请号:US13490214
申请日:2012-06-06
申请人: Lifan Chen , Haifeng Wang , Liang Hong , Nattaporn Khamnualthong
发明人: Lifan Chen , Haifeng Wang , Liang Hong , Nattaporn Khamnualthong
IPC分类号: H01J37/07 , H01J37/244 , H01J49/04 , H01J49/00
CPC分类号: H01J49/0004 , G01N23/04 , G01N2223/418 , G01N2223/61 , H01J37/07 , H01J37/244
摘要: A method for characterizing a carbon overcoat is provided. The method includes performing electron energy loss spectroscopy (EELS) spectrum imaging for an area of a preselected carbon-based material and an area of the carbon overcoat to generate a reference EELS dataset and a carbon overcoat EELS dataset, respectively, and determining a carbon bonding content of the carbon overcoat based on the reference EELS dataset and the carbon overcoat EELS dataset.
摘要翻译: 提供了表征碳外涂层的方法。 该方法包括对预选的碳基材料的面积和碳外涂层的面积进行电子能量损失光谱(EELS)光谱成像,分别产生参考EELS数据集和碳外涂层EELS数据集,并确定碳键 基于参考EELS数据集和碳覆盖层EELS数据集的碳外涂层含量。