Invention Grant
- Patent Title: Integrated structure and method for fabricating the same
- Patent Title (中): 集成结构及其制造方法
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Application No.: US14140523Application Date: 2013-12-25
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Publication No.: US09343359B2Publication Date: 2016-05-17
- Inventor: Chun-Hung Chen , Ming-Tse Lin , Yung-Chang Lin , Chien-Li Kuo
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: H01L21/3205
- IPC: H01L21/3205 ; H01L21/768 ; H01L23/48 ; H01L23/532 ; H01L23/525

Abstract:
A method for fabricating integrated structure is disclosed. The method includes the steps of: providing a substrate; forming a through-silicon hole in the substrate; forming a patterned resist on the substrate, wherein the patterned resist comprises at least one opening corresponding to a redistribution layer (RDL) pattern and exposing the through-silicon hole and at least another opening corresponding to another redistribution layer (RDL) pattern and connecting to the at least one opening; and forming a conductive layer to fill the through-silicon hole, the at least one opening and the at least another opening in the patterned resist so as to form a through-silicon via, a through-silicon via RDL pattern and another RDL pattern in one structure.
Public/Granted literature
- US20150179516A1 INTEGRATED STRUCTURE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2015-06-25
Information query
IPC分类: