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US09353444B2 Two-step deposition with improved selectivity 有权
两步沉积,提高了选择性

Two-step deposition with improved selectivity
Abstract:
A method for providing an electroless plating over at least one copper containing layer is provided. Surfaces of the at least one copper containing layer are sealed by selectively depositing a sealing layer of catalytically active metal on the at least one copper containing layer. The sealing layer is exposed to an electroless deposition bath that is more reactive to the catalytically active metal than to the at least one copper containing layer to provide an electroless deposition on the sealing layer.
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