Invention Grant
- Patent Title: Detection of selected defects in relatively noisy inspection data
- Patent Title (中): 检测相对嘈杂的检查数据中选定的缺陷
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Application No.: US13649080Application Date: 2012-10-10
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Publication No.: US09355440B1Publication Date: 2016-05-31
- Inventor: Haiguang Chen , Michael D. Kirk , Stephen Biellak , Jaydeep Sinha
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corp.
- Current Assignee: KLA-Tencor Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G01N21/88

Abstract:
Methods and systems for detection of selected defects in relatively noisy inspection data are provided. One method includes applying a spatial filter algorithm to inspection data acquired across an area on a substrate to determine a first portion of the inspection data that has a higher probability of being a selected type of defect than a second portion of the inspection data. The selected type of defect includes a non-point defect. The inspection data is generated by combining two or more raw inspection data corresponding to substantially the same locations on the substrate. The method also includes generating a two-dimensional map illustrating the first portion of the inspection data. The method further includes searching the two-dimensional map for an event that has spatial characteristics that approximately match spatial characteristics of the selected type of defect and determining if the event corresponds to a defect having the selected type.
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