Invention Grant
- Patent Title: Electrically controllable integrated switch
- Patent Title (中): 电控集成开关
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Application No.: US14286331Application Date: 2014-05-23
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Publication No.: US09355802B2Publication Date: 2016-05-31
- Inventor: Christian Rivero , Pascal Fornara , Antonio di-Giacomo , Brice Arrazat
- Applicant: STMicroelectronics (Rousset) SAS
- Applicant Address: FR Rousset
- Assignee: STMICROELECTRONICS (ROUSSET) SAS
- Current Assignee: STMICROELECTRONICS (ROUSSET) SAS
- Current Assignee Address: FR Rousset
- Agency: Slater Matsil, LLP
- Main IPC: H01H59/00
- IPC: H01H59/00 ; H01L27/06 ; H01L21/822 ; H01H1/00 ; H01L23/522

Abstract:
An integrated circuit includes an interconnection part with several metallization levels. An electrically activatable switching device within the interconnection part has an assembly that includes a beam held by a structure. The beam and structure are located within the same metallization level. Locations of fixing of the structure on the beam are arranged so as to define for the beam a pivot point situated between these fixing locations. The structure is substantially symmetric with respect to the beam and to a plane perpendicular to the beam in the absence of a potential difference. The beam is able to pivot in a first direction in the presence of a first potential difference applied between a first part of the structure and to pivot in a second direction in the presence of a second potential difference applied between a second part of the structure.
Public/Granted literature
- US20140360851A1 Electrically Controllable Integrated Switch Public/Granted day:2014-12-11
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