Invention Grant
- Patent Title: Electron microscope and electron beam detector
- Patent Title (中): 电子显微镜和电子束检测器
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Application No.: US14423081Application Date: 2013-08-09
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Publication No.: US09355815B2Publication Date: 2016-05-31
- Inventor: Shin Imamura , Takashi Ohshima , Yoichi Ose , Kenichi Hirane
- Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2012-210796 20120925
- International Application: PCT/JP2013/071611 WO 20130809
- International Announcement: WO2014/050326 WO 20140403
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01J37/244 ; H01J37/28

Abstract:
An electron microscope is provided with a scintillator (7) and a light guide (8). The scintillator (7) has an index of refraction greater than the index of refraction of the light guide (8), and an end surface (72) joined to the light guide (8) is formed from a curved surface with a convex shape on the outside. The scintillator (7) is formed by a Y—Al—O based ceramic sintered body represented by the compositional formula (Ln1-xCex)3M5O12 (wherein Ln represents at least one element selected from the group consisting of Y, Gd, La, and Lu, and M represents either or both of Al and Ga).
Public/Granted literature
- US20150214002A1 ELECTRON MICROSCOPE AND ELECTRON BEAM DETECTOR Public/Granted day:2015-07-30
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