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公开(公告)号：US10679821B1
公开(公告)日：2020-06-09
申请号：US16751705
申请日：2020-01-24
Applicant: Hitachi High-Technologies Corporation
Inventor： Yoshifumi Sekiguchi , Shin Imamura , Hajime Kawano , Shahedul Hoque
IPC: H01J37/20 , H01J37/28 , H01J37/244
Abstract: A charged particle beam device includes a scintillator and a light guide. The light guide has an incident surface configured to incident a light from the scintillator, an emission surface configured to emit a light incident from the incident surface, and a first surface configured to guide the light incident from the incident surface to a side of the emission surface. The light guide has a bent portion. The bent portion has a second surface configured to guide the light to the side of the emission surface in regions excluding a region between the incident surface and the emission surface.
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Patent Agency Ranking
公开(公告)号：US11506534B2
公开(公告)日：2022-11-22
申请号：US16472129
申请日：2017-10-24
Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
Inventor： Takeshi Ishida , Isao Yamazaki , Sakuichiro Adachi , Shin Imamura
Abstract: An automatic analysis apparatus comprises: a light source generating light having a center wavelength equal to or shorter than 340 nm; a fluorescent substance excited by the light source light, and generates light together with transmitted light from the light source, having a wavelength of 340 nm to 800 nm; a condenser lens; at least one slit; a reaction cell holding a reaction solution where a specimen and reagent are mixed, and that the light source light and the light from the fluorescent substance enter; and a detector that detects light transmitted through the reaction cell. The light source, fluorescent substance, condenser lens, and slit are provided along a straight light corresponding to the optical axis. The width of the slit's opening is equal to or narrower than the width of a ray forming an image of the light source at the position of the slit.
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公开(公告)号：US09355815B2
公开(公告)日：2016-05-31
申请号：US14423081
申请日：2013-08-09
Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
Inventor： Shin Imamura , Takashi Ohshima , Yoichi Ose , Kenichi Hirane
IPC: H01J37/00 , H01J37/244 , H01J37/28
CPC classification number: H01J37/244 , H01J37/28 , H01J2237/063 , H01J2237/2443 , H01J2237/2445 , H01J2237/28 , H01J2237/2801
Abstract: An electron microscope is provided with a scintillator (7) and a light guide (8). The scintillator (7) has an index of refraction greater than the index of refraction of the light guide (8), and an end surface (72) joined to the light guide (8) is formed from a curved surface with a convex shape on the outside. The scintillator (7) is formed by a Y—Al—O based ceramic sintered body represented by the compositional formula (Ln1-xCex)3M5O12 (wherein Ln represents at least one element selected from the group consisting of Y, Gd, La, and Lu, and M represents either or both of Al and Ga).
Abstract translation: 电子显微镜设有闪烁体（7）和光导（8）。 闪烁体（7）的折射率大于导光体（8）的折射率，与导光体（8）接合的端面（72）由凸形的曲面形成 外。 闪烁体（7）由组成式（Ln1-xCex）3M5O12表示的Y-Al-O系陶瓷烧结体形成（其中Ln表示选自Y，Gd，La和 Lu和M表示Al和Ga中的任一个或两者）。
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公开(公告)号：US20150214002A1
公开(公告)日：2015-07-30
申请号：US14423081
申请日：2013-08-09
Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
Inventor： Shin Imamura , Takashi Ohshima , Yoichi Ose , Kenichi Hirane
IPC: H01J37/244 , H01J37/28
CPC classification number: H01J37/244 , H01J37/28 , H01J2237/063 , H01J2237/2443 , H01J2237/2445 , H01J2237/28 , H01J2237/2801
Abstract: An electron microscope is provided with a scintillator (7) and a light guide (8). The scintillator (7) has an index of refraction greater than the index of refraction of the light guide (8), and an end surface (72) joined to the light guide (8) is formed from a curved surface with a convex shape on the outside. The scintillator (7) is formed by a Y—Al—O based ceramic sintered body represented by the compositional formula (Ln1-xCex)3M5O12 (wherein Ln represents at least one element selected from the group consisting of Y, Gd, La, and Lu, and M represents either or both of Al and Ga).
Abstract translation: 电子显微镜设有闪烁体（7）和光导（8）。 闪烁体（7）具有大于导光体（8）的折射率的折射率，与导光体（8）接合的端面（72）由凸形的曲面形成 外。 闪烁体（7）由组成式（Ln1-xCex）3M5O12表示的Y-Al-O系陶瓷烧结体形成（其中Ln表示选自Y，Gd，La和 Lu和M表示Al和Ga中的任一个或两者）。
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公开(公告)号：US10593512B2
公开(公告)日：2020-03-17
申请号：US16082745
申请日：2017-02-03
Applicant: Hitachi High-Technologies Corporation
Inventor： Yoshifumi Sekiguchi , Shin Imamura , Hajime Kawano , Shahedul Hoque
IPC: H01J37/20 , H01J37/26 , H01J37/244 , H01J37/28
Abstract: The present invention provides a light guide capable of guiding light generated by a scintillator at high efficiency to a photoreceiving element, a detector, and a charged particle beam device. For attaining the purpose, the present invention proposes a light guide that guides light generated by a scintillator to a photoreceiving element, provided with a scintillator containment portion formed of a first surface facing a surface opposite to a charged particle incident surface of the scintillator and a second surface facing a surface different from the surface opposite to the charged particle incident surface of the scintillator, and a tilted surface reflecting light incident from the second surface to the inside of the light guide.
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公开(公告)号：US10984979B2
公开(公告)日：2021-04-20
申请号：US16475726
申请日：2018-01-25
Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
Inventor： Shin Imamura , Takashi Ohshima , Tomonobu Tsuchiya , Hajime Kawano , Shahedul Hoque , Shunsuke Mizutani , Makoto Suzuki
IPC: G01T1/20 , H01J37/244 , G01N23/2258 , H01J37/28 , H01J49/02
Abstract: The disclosure provides a charged particle detector including a scintillator that emits light with stable intensity and obtains high light emission intensity regardless of an energy of an incident electron. The disclosure provides the charged particle detector including: a first light-emitting part (21) in which a layer containing Ga1-x-yAlxInyN (where 0≤x
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