Invention Grant
- Patent Title: Semiconductor devices with enhanced electromigration performance
- Patent Title (中): 具有增强的电迁移性能的半导体器件
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Application No.: US14515925Application Date: 2014-10-16
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Publication No.: US09362229B2Publication Date: 2016-06-07
- Inventor: Jeffrey P. Gambino , David L. Harame , Baozhen Li , Timothy D. Sullivan , Bjorn K. A. Zetterlund
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L23/532 ; H01L21/768 ; H01L23/522

Abstract:
Semiconductor devices with enhanced electromigration performance and methods of manufacture are disclosed. The method includes forming at least one metal line in electrical contact with a device. The method further includes forming at least one staple structure in electrical contact with the at least one metal line. The at least one staple structure is formed such that electrical current passing through the at least one metal line also passes through the at least staple structure to reduce electromigration issues.
Public/Granted literature
- US20150035158A1 SEMICONDUCTOR DEVICES WITH ENHANCED ELECTROMIGRATION PERFORMANCE Public/Granted day:2015-02-05
Information query
IPC分类: