Invention Grant
US09373721B2 Methods of forming a non-planar ultra-thin body semiconductor device and the resulting devices
有权
形成非平面超薄体半导体器件的方法和所得到的器件
- Patent Title: Methods of forming a non-planar ultra-thin body semiconductor device and the resulting devices
- Patent Title (中): 形成非平面超薄体半导体器件的方法和所得到的器件
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Application No.: US14175113Application Date: 2014-02-07
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Publication No.: US09373721B2Publication Date: 2016-06-21
- Inventor: Ajey Poovannummoottil Jacob , Ruilong Xie , Michael Hargrove
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/8234 ; H01L21/8238 ; H01L29/66 ; H01L29/51 ; H01L27/088 ; H01L27/12 ; H01L29/10 ; H01L29/778

Abstract:
One device disclosed includes a gate structure positioned around a perimeter surface of the fin, a layer of channel semiconductor material having an axial length in the channel length direction of the device that corresponds approximately to the overall width of the gate structure being positioned between the gate structure and around the outer perimeter surface of the fin, wherein an inner surface of the layer of channel semiconductor material is spaced apart from and does not contact the outer perimeter surface of the fin. One method disclosed involves, among other things, forming first and second layers of semiconductor material around the fin, forming a gate structure around the second semiconductor material, removing the portions of the first and second layers of semiconductor material positioned laterally outside of sidewall spacers and removing the first layer of semiconductor material positioned below the second layer of semiconductor material.
Public/Granted literature
- US20150228792A1 METHODS OF FORMING A NON-PLANAR ULTRA-THIN BODY SEMICONDUCTOR DEVICE AND THE RESULTING DEVICES Public/Granted day:2015-08-13
Information query
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