发明授权
- 专利标题: Laser chamber and discharge excitation gas laser apparatus
- 专利标题(中): 激光室和放电激发气体激光装置
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申请号: US14694743申请日: 2015-04-23
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公开(公告)号: US09373926B2公开(公告)日: 2016-06-21
- 发明人: Hiroaki Tsushima , Hakaru Mizoguchi , Junichi Fujimoto , Hiroaki Nakarai , Natsushi Suzuki
- 申请人: GIGAPHOTON INC.
- 申请人地址: JP Tochigi
- 专利权人: GIGAPHOTON INC.
- 当前专利权人: GIGAPHOTON INC.
- 当前专利权人地址: JP Tochigi
- 代理机构: Studebaker & Brackett PC
- 优先权: JP2012-243790 20121105
- 主分类号: H01S3/036
- IPC分类号: H01S3/036 ; F16C33/66 ; F16C32/04 ; H01S3/134 ; H01S3/225 ; H01S3/038 ; H01S3/097 ; H01S3/223 ; H01S3/104 ; F16C19/06 ; H01S3/0971 ; H01S3/1055
摘要:
There is provided a laser chamber housing a pair of discharge electrodes and a gas circulation fun, the laser chamber including: a magnetic bearing configured to support a shaft of the gas circulation fan, with the shaft being in non-contact with the magnetic bearing; and a touchdown bearing configured to operate as a bearing when the magnetic bearing is uncontrollable, the touchdown bearing being provided with solid lubricant configured of one or more of an Au plating layer, a Ni-containing plating layer, and a Cu plating layer.
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