Invention Grant
- Patent Title: Laser chamber and discharge excitation gas laser apparatus
- Patent Title (中): 激光室和放电激发气体激光装置
-
Application No.: US14694743Application Date: 2015-04-23
-
Publication No.: US09373926B2Publication Date: 2016-06-21
- Inventor: Hiroaki Tsushima , Hakaru Mizoguchi , Junichi Fujimoto , Hiroaki Nakarai , Natsushi Suzuki
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi
- Assignee: GIGAPHOTON INC.
- Current Assignee: GIGAPHOTON INC.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: JP2012-243790 20121105
- Main IPC: H01S3/036
- IPC: H01S3/036 ; F16C33/66 ; F16C32/04 ; H01S3/134 ; H01S3/225 ; H01S3/038 ; H01S3/097 ; H01S3/223 ; H01S3/104 ; F16C19/06 ; H01S3/0971 ; H01S3/1055

Abstract:
There is provided a laser chamber housing a pair of discharge electrodes and a gas circulation fun, the laser chamber including: a magnetic bearing configured to support a shaft of the gas circulation fan, with the shaft being in non-contact with the magnetic bearing; and a touchdown bearing configured to operate as a bearing when the magnetic bearing is uncontrollable, the touchdown bearing being provided with solid lubricant configured of one or more of an Au plating layer, a Ni-containing plating layer, and a Cu plating layer.
Public/Granted literature
- US20150249312A1 LASER CHAMBER AND DISCHARGE EXCITATION GAS LASER APPARATUS Public/Granted day:2015-09-03
Information query