发明授权
US09373926B2 Laser chamber and discharge excitation gas laser apparatus 有权
激光室和放电激发气体激光装置

Laser chamber and discharge excitation gas laser apparatus
摘要:
There is provided a laser chamber housing a pair of discharge electrodes and a gas circulation fun, the laser chamber including: a magnetic bearing configured to support a shaft of the gas circulation fan, with the shaft being in non-contact with the magnetic bearing; and a touchdown bearing configured to operate as a bearing when the magnetic bearing is uncontrollable, the touchdown bearing being provided with solid lubricant configured of one or more of an Au plating layer, a Ni-containing plating layer, and a Cu plating layer.
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