发明授权
- 专利标题: Barrier film defect detecting method and apparatus
- 专利标题(中): 阻隔膜缺陷检测方法及装置
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申请号: US14019476申请日: 2013-09-05
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公开(公告)号: US09389197B2公开(公告)日: 2016-07-12
- 发明人: Alexander Voronov , Gyoo-Wan Han , Ji-Hun Jung
- 申请人: Samsung Display Co., Ltd.
- 申请人地址: KR Yongin-si
- 专利权人: Samsung Display Co., Ltd.
- 当前专利权人: Samsung Display Co., Ltd.
- 当前专利权人地址: KR Yongin-si
- 代理机构: Lewis Roca Rothgerber Christie LLP
- 优先权: KR10-2013-0016976 20130218
- 主分类号: G01R27/08
- IPC分类号: G01R27/08 ; G01N27/20 ; G01N27/02 ; G01N19/08 ; G01N21/88 ; G01N23/18
摘要:
A method for detecting a defect of a barrier film includes preparing a device including an electrode and a barrier film covering the electrode, allowing a charged medium to contact a surface of the barrier film, and measuring a change in a flow of current between the charged medium and the electrode.
公开/授权文献
- US20140232419A1 BARRIER FILM DEFECT DETECTING METHOD AND APPARATUS 公开/授权日:2014-08-21
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