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1.发明授权Laser beam irradiation apparatus and manufacturing method of organic light emitting display apparatus using the same 有权激光束照射装置及使用其的有机发光显示装置的制造方法公开(公告)号：US09515294B2
公开(公告)日：2016-12-06
申请号：US14510322
申请日：2014-10-09
发明人： Gyoo-Wan Han , Ku-Hyun Kang , Hae-Sook Lee , Jin-Hong Jeun , Kyoung-Seok Cho
CPC分类号： G02B26/10 , G02B13/0005 , G02B27/0927 , G02B27/0988 , G02B27/10 , G02B27/106 , G02B27/144 , G02F1/113 , H01L27/3244 , H01L27/3248 , H01L51/5228 , H01L51/56 , H01L2227/323
摘要： A laser beam irradiation apparatus includes a laser light source, a controller for controlling energy of light generated by the laser source, a first optical system for adjusting a shape of light that has passed through the controller, a scanner for adjusting the direction of light that has passed through the first optical system, and an F-theta lens for reducing a beam that has passed through the scanner.
摘要翻译： 激光束照射装置包括激光源，用于控制由激光源产生的光的能量的控制器，用于调节通过控制器的光的形状的第一光学系统，用于调节光的方向的扫描仪， 已经通过第一光学系统和用于减少已经通过扫描仪的光束的F-theta透镜。
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公开(公告)号：US09279978B2
公开(公告)日：2016-03-08
申请号：US14190661
申请日：2014-02-26
发明人： Sung-Gon Kim , Je-Kil Ryu , Gyoo-Wan Han , Hae-Sook Lee , Tae-Yong Kim
CPC分类号： G02B26/0816 , G02B7/1825 , H01S5/0071
摘要： Apparatus for uniformizing light amount distribution by shaking line beams along a longitudinal axis direction is provided. The apparatus includes a mirror mount, a mirror, an actuator, and a deformation member. The mirror fixed to the mirror mount and includes a reflective surface. The actuator is disposed at a distance from the mirror mount and configured to repeat expansion and contraction along a first direction. The deformation member includes a plurality of blocks connected to each other by flexible joints and is coupled to the actuator and the mirror mount. The deformation member is configured to change a displacement in the first direction due to operation of the actuator to a displacement in a second direction that crosses the first direction, amplify the changed displacement, and transmit the amplified displacement to the mirror mount.
摘要翻译： 提供了通过沿纵向轴线方向抖动线束使光量分布均匀化的装置。 该装置包括反射镜安装件，反射镜，致动器和变形构件。 镜子固定在镜面支架上并包括一个反光表面。 致动器设置在距反射镜安装座一定距离处，并被配置成沿着第一方向重复膨胀和收缩。 变形构件包括通过柔性接头彼此连接并且连接到致动器和反射镜座的多个块。 变形构件被构造成将由于致动器的操作引起的在第一方向上的位移沿与第一方向相交的第二方向的位移改变，放大变化的位移，并且将放大的位移传递到反射镜座。
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公开(公告)号：US09389197B2
公开(公告)日：2016-07-12
申请号：US14019476
申请日：2013-09-05
发明人： Alexander Voronov , Gyoo-Wan Han , Ji-Hun Jung
摘要： A method for detecting a defect of a barrier film includes preparing a device including an electrode and a barrier film covering the electrode, allowing a charged medium to contact a surface of the barrier film, and measuring a change in a flow of current between the charged medium and the electrode.
摘要翻译： 用于检测阻挡膜的缺陷的方法包括制备包括电极和覆盖电极的阻挡膜的器件，允许带电介质接触阻挡膜的表面，并测量电荷流动之间的电流流动的变化 介质和电极。
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4.发明授权Apparatus for monitoring deposition rate, apparatus provided with the same for depositing organic layer, method of monitoring deposition rate, and method of manufacturing organic light emitting display apparatus using the same 有权用于监测沉积速率的装置，用于沉积有机层的装置，用于监测沉积速率的方法，以及使用其制造有机发光显示装置的方法公开(公告)号：US09347886B2
公开(公告)日：2016-05-24
申请号：US14079522
申请日：2013-11-13
发明人： Alexander Voronov , Dmitry Maslov , Gyoo-Wan Han
CPC分类号： G01N21/6489 , C23C14/24 , C23C14/547 , C23C14/568
摘要： An apparatus for monitoring deposition rate, an apparatus including the same, for depositing an organic layer, a method of monitoring deposition rate, and a method of manufacturing an organic light emitting display apparatus using the same, are provided. The deposition rate monitoring apparatus for measuring deposition rate of a deposition material discharged from a deposition source, includes: a light source for irradiating light having a wavelength within a photoexcitation bandwidth of the deposition material; a first optical system for irradiating the light emitted from the light source toward the discharged deposition material; a second optical system for collecting the light emitted from the deposition material; and a first light sensor for detecting the amount of the light which is emitted from the deposition material and collected in the second optical system.
摘要翻译： 提供了一种用于监测沉积速率的装置，包括其的装置，用于沉积有机层，监测沉积速率的方法，以及制造使用其的有机发光显示装置的方法。 用于测量从沉积源排出的沉积材料的沉积速率的沉积速率监测装置包括：用于照射具有在沉积材料的光激发带宽内的波长的光的光源; 第一光学系统，用于将从光源发射的光朝向排出的沉积材料照射; 用于收集从沉积材料发射的光的第二光学系统; 以及第一光传感器，用于检测从沉积材料发射并收集在第二光学系统中的光量。
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5.发明申请METHOD OF FORMING ORGANIC LIGHT EMITTING PATTERN AND APPARATUS FOR FORMING ORGANIC LIGHT EMITTING PATTERN OF ORGANIC ELECTRO-LUMINESCENCE DISPLAY USING SUBLIMATION TYPE THERMAL TRANSFER METHOD 有权有机发光图案的形成方法和用于形成有机电致发光的有机发光图案的装置使用底层类型的热传递方法公开(公告)号：US20140295601A1
公开(公告)日：2014-10-02
申请号：US14225143
申请日：2014-03-25
发明人： Alexander Voronov , Gyoo-Wan Han
IPC分类号： H01L51/00
CPC分类号： H01L51/0013
摘要： A method of forming an organic light emitting pattern of an organic electro-luminescence display according to an exemplary embodiment of the present invention includes preparing a display substrate in which a region where a first organic light emitting material is to be formed is defined, preparing a temporal transfer substrate (TTS) that is a transfer subject on which the first organic light emitting material is to be transferred, forming the first organic light emitting material on the temporal transfer substrate, applying heat to a portion other than a first region of the temporal transfer substrate to remove the first organic light emitting material formed on the portion other than the first region, disposing the temporal transfer substrate and the display substrate to closely face each other, and applying heat to the temporal transfer substrate to transfer the organic light emitting material on the display substrate.
摘要翻译： 根据本发明的示例性实施例的形成有机电致发光显示器的有机发光图案的方法包括制备其中要形成第一有机发光材料的区域的显示基板，制备 时间转移衬底（TTS），其是要转移第一有机发光材料的转移对象，在时间转移衬底上形成第一有机发光材料，向除了第一有机发光材料的第一区域以外的部分施加热量 转移基板以除去形成在第一区域之外的部分上的第一有机发光材料，将时间转移基板和显示基板彼此紧密相对地设置，并且向时间转移基板施加热量以转移有机发光材料 在显示基板上。
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公开(公告)号：US09460930B2
公开(公告)日：2016-10-04
申请号：US14159386
申请日：2014-01-20
发明人： Nang-Lyeom Oh , Je-Kil Ryu , Alexander Voronov , Gyoo-Wan Han
IPC分类号： H01L21/00 , H01L21/268 , B23K26/06 , H01L21/02
CPC分类号： H01L21/268 , B23K26/0648 , H01L21/02532 , H01L21/02675 , H01L21/02691
摘要： A method for performing a laser crystallization is provided. The method includes generating a laser beam, refracting the laser beam to uniformize an intensity of the laser beam at a focal plane of the laser beam. The laser beam whose intensity is uniformized is applied into an object substrate mounted with a stage.
摘要翻译： 提供了一种执行激光结晶的方法。 该方法包括产生激光束，折射激光束以使激光束在激光束的焦平面处的强度均匀化。 将其强度均匀化的激光束施加到安装有台的对象基板中。
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公开(公告)号：US20150017816A1
公开(公告)日：2015-01-15
申请号：US14159386
申请日：2014-01-20
发明人： Nang-Lyeom Oh , Je-Kil Ryu , Alexander Voronov , Gyoo-Wan Han
IPC分类号： H01L21/268 , H01L21/263
CPC分类号： H01L21/268 , B23K26/0648 , H01L21/02532 , H01L21/02675 , H01L21/02691
摘要： A method for performing a laser crystallization is provided. The method includes generating a laser beam, refracting the laser beam to uniformize an intensity of the laser beam at a focal plane of the laser beam. The laser beam whose intensity is uniformized is applied into an object substrate mounted with a stage.
摘要翻译： 提供了一种执行激光结晶的方法。 该方法包括产生激光束，折射激光束以使激光束在激光束的焦平面处的强度均匀化。 将其强度均匀化的激光束施加到安装有台的对象基板中。
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公开(公告)号：US09700960B2
公开(公告)日：2017-07-11
申请号：US13784724
申请日：2013-03-04
发明人： Il-Young Jeong , Gyoo-Wan Han , Jun-Hyung Kim
IPC分类号： B23K26/142 , B23K26/362
CPC分类号： B23K26/142 , B23K26/361 , B23K26/362
摘要： A laser processing apparatus using a laser. The laser processing apparatus includes a light source for generating a hollow laser beam in a first direction; a reflection member for changing a path of the hollow laser beam toward the first direction into a second direction toward the substrate; a lens for collecting the hollow laser beam reflected by the reflection member; and an air supply unit for supplying air toward particles generated while the substrate is processed by the hollow laser beam, wherein the lens has a first hole passing through the lens, the reflection member has a second hole passing through the reflection member, and the first and second holes form a discharge path of the particles.
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9.发明授权公开(公告)号：US09065054B2
公开(公告)日：2015-06-23
申请号：US14225143
申请日：2014-03-25
发明人： Alexander Voronov , Gyoo-Wan Han
IPC分类号： H01L51/00
CPC分类号： H01L51/0013
摘要： A method of forming an organic light emitting pattern of an organic electro-luminescence display according to an exemplary embodiment of the present invention includes preparing a display substrate in which a region where a first organic light emitting material is to be formed is defined, preparing a temporal transfer substrate (TTS) that is a transfer subject on which the first organic light emitting material is to be transferred, forming the first organic light emitting material on the temporal transfer substrate, applying heat to a portion other than a first region of the temporal transfer substrate to remove the first organic light emitting material formed on the portion other than the first region, disposing the temporal transfer substrate and the display substrate to closely face each other, and applying heat to the temporal transfer substrate to transfer the organic light emitting material on the display substrate.
摘要翻译： 根据本发明的示例性实施例的形成有机电致发光显示器的有机发光图案的方法包括制备其中要形成第一有机发光材料的区域的显示基板，制备 时间转移衬底（TTS），其是要转移第一有机发光材料的转移对象，在时间转移衬底上形成第一有机发光材料，向除了第一有机发光材料的第一区域以外的部分施加热量 转移基板以除去形成在第一区域之外的部分上的第一有机发光材料，将时间转移基板和显示基板彼此紧密相对地设置，并且向时间转移基板施加热量以转移有机发光材料 在显示基板上。
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10.发明申请APPARATUS FOR MONITORING DEPOSITION RATE, APPARATUS PROVIDED WITH THE SAME FOR DEPOSITING ORGANIC LAYER, METHOD OF MONITORING DEPOSITION RATE, AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SAME 有权用于监测沉积速率的装置，用于沉积有机层的装置，监测沉积速率的方法，以及使用该方法制造有机发光显示装置的方法公开(公告)号：US20140377890A1
公开(公告)日：2014-12-25
申请号：US14079522
申请日：2013-11-13
发明人： Alexander Voronov , Dmitry Maslov , Gyoo-Wan Han
CPC分类号： G01N21/6489 , C23C14/24 , C23C14/547 , C23C14/568
摘要： An apparatus for monitoring deposition rate, an apparatus including the same, for depositing an organic layer, a method of monitoring deposition rate, and a method of manufacturing an organic light emitting display apparatus using the same, are provided. The deposition rate monitoring apparatus for measuring deposition rate of a deposition material discharged from a deposition source, includes: a light source for irradiating light having a wavelength within a photoexcitation bandwidth of the deposition material; a first optical system for irradiating the light emitted from the light source toward the discharged deposition material; a second optical system for collecting the light emitted from the deposition material; and a first light sensor for detecting the amount of the light which is emitted from the deposition material and collected in the second optical system.
摘要翻译： 提供了一种用于监测沉积速率的装置，包括其的装置，用于沉积有机层，监测沉积速率的方法，以及制造使用其的有机发光显示装置的方法。 用于测量从沉积源排出的沉积材料的沉积速率的沉积速率监测装置包括：用于照射具有在沉积材料的光激发带宽内的波长的光的光源; 第一光学系统，用于将从光源发射的光朝向排出的沉积材料照射; 用于收集从沉积材料发射的光的第二光学系统; 以及第一光传感器，用于检测从沉积材料发射并收集在第二光学系统中的光量。
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