BARRIER FILM DEFECT DETECTING METHOD AND APPARATUS
    2.
    发明申请
    BARRIER FILM DEFECT DETECTING METHOD AND APPARATUS 有权
    障碍物膜缺陷检测方法和装置

    公开(公告)号:US20140232419A1

    公开(公告)日:2014-08-21

    申请号:US14019476

    申请日:2013-09-05

    CPC classification number: G01N27/20 G01N19/08 G01N21/88 G01N23/18 G01N27/02

    Abstract: A method for detecting a defect of a barrier film includes preparing a device including an electrode and a barrier film covering the electrode, allowing a charged medium to contact a surface of the barrier film, and measuring a change in a flow of current between the charged medium and the electrode.

    Abstract translation: 用于检测阻挡膜的缺陷的方法包括制备包括电极和覆盖电极的阻挡膜的器件,允许带电介质接触阻挡膜的表面,并测量电荷流动之间的电流流动的变化 介质和电极。

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