发明授权
US09390991B2 Semiconductor device and method of forming wafer level ground plane and power ring
有权
半导体器件及其形成晶圆级接地面和电源环的方法
- 专利标题: Semiconductor device and method of forming wafer level ground plane and power ring
- 专利标题(中): 半导体器件及其形成晶圆级接地面和电源环的方法
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申请号: US13346415申请日: 2012-01-09
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公开(公告)号: US09390991B2公开(公告)日: 2016-07-12
- 发明人: Guruprasad G. Badakere , Zigmund R. Camacho , Lionel Chien Hui Tay
- 申请人: Guruprasad G. Badakere , Zigmund R. Camacho , Lionel Chien Hui Tay
- 申请人地址: SG Singapore
- 专利权人: STATS ChipPAC Pte. Ltd.
- 当前专利权人: STATS ChipPAC Pte. Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Patent Law Group: Atkins and Associates, P.C.
- 代理商 Robert D. Atkins
- 主分类号: H01L23/31
- IPC分类号: H01L23/31 ; H01L23/58 ; H01L23/528 ; H01L23/00 ; H01L21/683 ; H01L21/56
摘要:
A semiconductor die has active circuits formed on its active surface. Contact pads are formed on the active surface of the semiconductor die and coupled to the active circuits. A die extension region is formed around a periphery of the semiconductor die. Conductive THVs are formed in the die extension region. A wafer level conductive plane or ring is formed on a center area of the active surface. The conductive plane or ring is connected to a first contact pad to provide a first power supply potential to the active circuits, and is electrically connected to a first conductive THV. A conductive ring is formed partially around a perimeter of the conductive plane or ring and connected to a second contact pad for providing a second power supply potential to the active circuits. The conductive ring is electrically connected to a second THV.
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