Invention Grant
US09397143B2 Liner for phase change memory (PCM) array and associated techniques and configurations
有权
相变存储器(PCM)阵列和相关技术和配置的衬垫
- Patent Title: Liner for phase change memory (PCM) array and associated techniques and configurations
- Patent Title (中): 相变存储器(PCM)阵列和相关技术和配置的衬垫
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Application No.: US14137864Application Date: 2013-12-20
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Publication No.: US09397143B2Publication Date: 2016-07-19
- Inventor: Noel Rocklein , Qian Tao , Zhe Song , Vishwanath Bhat
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00

Abstract:
Embodiments of the present disclosure describe a liner for a phase change memory (PCM) array and associated techniques and configurations. In an embodiment, a substrate, an array of phase change memory (PCM) elements disposed on the substrate, wherein individual PCM elements of the array of PCM elements comprise a chalcogenide material and a liner disposed on sidewall surfaces of the individual PCM elements, wherein the liner comprises aluminum (Al), silicon (Si) and oxygen (O). Other embodiments may be described and/or claimed.
Public/Granted literature
- US20150179706A1 LINER FOR PHASE CHANGE MEMORY (PCM) ARRAY AND ASSOCIATED TECHNIQUES AND CONFIGURATIONS Public/Granted day:2015-06-25
Information query
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