Invention Grant
- Patent Title: Method of design-based defect classification and system thereof
- Patent Title (中): 基于设计的缺陷分类方法及其系统
-
Application No.: US13756462Application Date: 2013-01-31
-
Publication No.: US09401013B2Publication Date: 2016-07-26
- Inventor: Mark Geshel , Zvi Goren , Efrat Rozenman
- Applicant: Applied Materials Israel Ltd.
- Applicant Address: IL Rehovot
- Assignee: Applied Materials Israel, Ltd.
- Current Assignee: Applied Materials Israel, Ltd.
- Current Assignee Address: IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06F19/00 ; G06T7/00 ; G01R31/26 ; G01R31/28 ; H01L21/66

Abstract:
There is provided an inspection method capable of classifying defects detected on a production layer of a specimen. The method comprises: obtaining input data related to the detected defects; processing the input data using a decision algorithm associated with the production layer and specifying two or more classification operations and a sequence thereof; and sorting the processed defects in accordance with predefined bins, wherein each bin is associated with at least one classification operation, wherein at least one classification operation sorts at least part of the processed defects to one or more classification bins to yield finally classified defects, and wherein each classification operation, excluding the last one, sorts at least part of the processed defects to be processed by one or more of the following classification operations.
Public/Granted literature
- US20150356719A9 METHOD OF DESIGN-BASED DEFECT CLASSIFICATION AND SYSTEM THEREOF Public/Granted day:2015-12-10
Information query