公开(公告)号：US09235885B2

公开(公告)日：2016-01-12

申请号：US13756399

申请日：2013-01-31

Applicant: Applied Materials Israel Ltd.

Inventor： Moshe Amzaleg ,  Nir Ben David Dodzin ,  Vered Gatt ,  Yair Hanani ,  Efrat Rozenman

IPC: G06T7/00 ,  G01N21/956 ,  H01L21/66

CPC classification number: G06T7/001 ,  G01N21/95607 ,  G01N2021/95615 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01L22/12

Abstract: A system capable of inspecting an article for defects, the system including: a patch comparator, configured to determine with respect to each of a plurality of reference patches in a reference image a similarity level, based on a predefined patch-similarity criterion and on a source patch defined in the reference image; an evaluation module, configured to rate each inspected pixel out of multiple inspected pixels of the inspection image with a representative score which is based on the similarity level of a reference patch associated with a reference pixel corresponding to the inspected pixel; a selection module, configured to select multiple selected inspected pixels based on the representative scores of the multiple inspected pixels; and a defect detection module, configured to determine a presence of a defect in the candidate pixel based on an inspected value of the candidate pixel and inspected values of the selected inspected pixels.

Abstract translation: 一种能够检查物品的缺陷的系统，所述系统包括：补丁比较器，被配置为基于预定的补丁相似性准则，在参考图像中确定相关性级别中的多个参考补丁中的每一个，并且基于 参考图片中定义的源补丁; 评估模块，其被配置为使用基于与对应于被检查像素的参考像素相关联的参考块的相似度级别的代表性分数对所述检查图像的多个被检查像素中的每个被检查像素进行评估; 选择模块，被配置为基于所述多个被检查像素的代表性分数来选择多个选择的被检查像素; 以及缺陷检测模块，被配置为基于候选像素的检查值和所选择的被检查像素的检查值来确定候选像素中的缺陷的存在。

公开(公告)号：US09070014B2

公开(公告)日：2015-06-30

申请号：US13773535

申请日：2013-02-21

Applicant: Applied Materials Israel Ltd.

Inventor： Moshe Amzaleg ,  Yehuda Cohen ,  Nir Ben-David Dodzin ,  Efrat Rozenman

IPC: G06K9/00

CPC classification number: G06K9/00536 ,  G06T7/001 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: A defect detection system for computerized detection of defects, the system including: an interface for receiving inspection image data including information of an analyzed pixel and of a plurality of reference pixels; and a processor, including: a differences analysis module, configured to: (a) calculate differences based on an inspected value representative of the analyzed pixel and on multiple reference values, each of which is representative of a reference pixel among the plurality of reference pixels; wherein the differences analysis module is configured to calculate for each of the reference pixels a difference between the reference value of the reference pixel and the inspected value; and (b) compute a representative difference value based on a plurality of the differences; and a defect analysis module, configured to determine a presence of a defect in the analyzed pixel based on the representative difference value.

Abstract translation: 一种用于计算机检测缺陷的缺陷检测系统，所述系统包括：用于接收包括所分析的像素和多个参考像素的信息的检查图像数据的接口; 以及处理器，包括：差异分析模块，被配置为：（a）基于代表所分析的像素的检查值和多个参考值计算差异，所述多个参考值代表所述多个参考像素中的参考像素 ; 其中所述差异分析模块被配置为针对每个参考像素计算所述参考像素的参考值和所述被检测值之间的差; 和（b）基于多个差异来计算代表性差值; 以及缺陷分析模块，被配置为基于所述代表性差值来确定所分析的像素中的缺陷的存在。

公开(公告)号：US09613255B2

公开(公告)日：2017-04-04

申请号：US14673712

申请日：2015-03-30

Applicant: Applied Materials Israel Ltd.

Inventor： Moshe Amzaleg ,  Ariel Shkalim ,  Efrat Rozenman

IPC: G06K9/62 ,  G06K9/00 ,  G06F3/048

CPC classification number: G06K9/00161 ,  G06F3/048 ,  G06K9/00577 ,  G06K9/6202 ,  G06T2207/30148

Abstract: Methods, systems, and computer program products for signature detection. One example of a method includes: acquiring an article defect density map comprising a plurality of sections corresponding to a first resolution level which is indicative of defect numbers for the sections, and determining a distribution representative of the defect numbers or function thereof; determining a threshold in accordance with said distribution, and identifying sections, out of said plurality of sections in the article defect density map, with defect numbers or function thereof above the threshold; and clustering at least part of adjoining identified sections, into one or more signatures, thus detecting said one or more signatures.

公开(公告)号：US09558548B2

公开(公告)日：2017-01-31

申请号：US14738370

申请日：2015-06-12

Applicant: Applied Materials Israel Ltd.

Inventor： Moshe Amzaleg ,  Yehuda Cohen ,  Nir Ben-David Dodzen ,  Efrat Rozenman

IPC: G06K9/00 ,  G06T7/00 ,  H01L21/67

CPC classification number: G06T7/001 ,  G06T7/0002 ,  G06T2207/30148 ,  H01L21/67288

Abstract: A system includes a memory and a processor device operatively coupled to the memory to obtain an inspected noise-indicative value representative of an analyzed pixel of an inspected image of an inspected object, and a reference noise-indicative value representative for each of multiple reference pixels of the inspected image. The processor device computes a representative noise-indicative value based on the inspected noise-indicative value and multiple reference noise-indicative values, calculates a defect-indicative value based on an inspected value representative of the analyzed pixel and determines a presence of a defect in the analyzed pixel based on the representative noise-indicative value and the defect-indicative value.

Abstract translation: 系统包括可操作地耦合到存储器的存储器和处理器装置，以获得表示被检查对象的被检查图像的分析像素的检查噪声指示值，以及代表多个参考像素中的每一个的参考噪声指示值 的被检查图像。 处理器设备基于被检查的噪声指示值和多个参考噪声指示值来计算代表性噪声指示值，基于表示分析像素的检测值来计算缺陷指示值，并且确定存在缺陷 基于代表性噪声指示值和缺陷指示值的分析像素。

公开(公告)号：US10545490B2

公开(公告)日：2020-01-28

申请号：US14727800

申请日：2015-06-01

Applicant: Applied Materials Israel Ltd.

Inventor： Michele Dalla-Torre ,  Amit Batikoff ,  Efrat Rozenman ,  Ron Katzir ,  Imry Kissos

IPC: G06K9/00 ,  G05B19/418 ,  G06T7/00 ,  G06K9/62

Abstract: There are provided a method of generating an inspection recipe usable for inspecting an inspection area of a specimen and a recipe generating unit. The recipe generating unit is configured: upon obtaining design data informative of design structural elements comprised in a design PoI corresponding to the at least one PoI, to provide global segmentation of a test image captured by an inspection tool unit from the inspection area and comprising at least one test PoI of substantially the same design as the at least one PoI, thereby to obtain segmented structural elements comprised in the test PoI and segmentation configuration data; to associate the segmented structural elements comprised in the test PoI with the design structural elements comprised in the design PoI, thereby to obtain design association data; and to generate an inspection recipe comprising, at least, segmentation configuration data and design association data.

公开(公告)号：US09851714B2

公开(公告)日：2017-12-26

申请号：US14728495

申请日：2015-06-02

Applicant: Applied Materials Israel Ltd.

Inventor： Michele Dalla-Torre ,  Amit Batikoff ,  Efrat Rozenman ,  Ron Katzir ,  Imry Kissos

IPC: G06K9/00 ,  G05B19/418 ,  G06K9/62 ,  G06T7/00

CPC classification number: G05B19/41875 ,  G05B2219/37224 ,  G05B2219/45031 ,  G06K9/6202 ,  G06T7/0004 ,  G06T7/001 ,  G06T2200/24 ,  G06T2207/30148 ,  Y02P90/265

Abstract: There are provided a method of inspecting the inspection area and an inspection system thereof. The inspection system comprises an inspection control unit operatively coupled to an inspection tool unit and to a recipe generating unit. The inspection control unit is configured to obtain the design data and the inspection recipe; to provide local segmentation of at least one inspection PoI comprised in an inspection image captured from the inspection area by the inspection tool unit, thereby obtaining inspection structural elements comprised in the at least one inspection PoI, the local segmentation is provided using segmentation configuration data specified in the inspection recipe; to identify one or more target structural elements and design structural elements corresponding thereto, identifying is provided using design association data specified in the inspection recipe; and to enable metrology measurements for the one or more target structural elements using the identified design structural elements.

公开(公告)号：US09767356B2

公开(公告)日：2017-09-19

申请号：US14738354

申请日：2015-06-12

Applicant: Applied Materials Israel Ltd.

Inventor： Moshe Amzaleg ,  Yehuda Cohen ,  Nir Ben-David Dodzen ,  Efrat Rozenman

IPC: G06K9/00 ,  G06T7/00

CPC classification number: G06K9/00536 ,  G06T7/001 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: A system including an interface for receiving inspection image data of an inspection image of an inspection object. The inspection image data includes information of an analyzed pixel of the inspected image and of reference pixels of the inspected image. The system further includes a memory and a processor device operatively coupled to the interface and the memory to obtain an inspected value representative of the analyzed pixel of the inspected image, and a reference value for each of the reference pixels of the inspected image. For each reference pixel, the processor devices calculates a difference between the reference value of a respective reference pixel and the inspected value of the analyzed pixel, computes a representative difference value based on the differences and determines a presence of a defect in the analyzed pixel based on the representative difference value.

公开(公告)号：US09401013B2

公开(公告)日：2016-07-26

申请号：US13756462

申请日：2013-01-31

Applicant: Applied Materials Israel Ltd.

Inventor： Mark Geshel ,  Zvi Goren ,  Efrat Rozenman

IPC: G06K9/00 ,  G06F19/00 ,  G06T7/00 ,  G01R31/26 ,  G01R31/28 ,  H01L21/66

CPC classification number: G06T7/0004 ,  G01R31/26 ,  G01R31/2894 ,  G06T7/0006 ,  G06T7/001 ,  G06T2207/30148 ,  H01L22/12

Abstract: There is provided an inspection method capable of classifying defects detected on a production layer of a specimen. The method comprises: obtaining input data related to the detected defects; processing the input data using a decision algorithm associated with the production layer and specifying two or more classification operations and a sequence thereof; and sorting the processed defects in accordance with predefined bins, wherein each bin is associated with at least one classification operation, wherein at least one classification operation sorts at least part of the processed defects to one or more classification bins to yield finally classified defects, and wherein each classification operation, excluding the last one, sorts at least part of the processed defects to be processed by one or more of the following classification operations.

Abstract translation: 提供了能够对在样品的生产层上检测到的缺陷进行分类的检查方法。 该方法包括：获取与检测到的缺陷相关的输入数据; 使用与生产层相关联的决策算法处理输入数据并指定两个或更多个分类操作及其序列; 以及根据预定义的箱分类处理的缺陷，其中每个仓与至少一个分类操作相关联，其中至少一个分类操作将至少部分经处理的缺陷排序到一个或多个分类箱以产生最终分类的缺陷，以及 其中除了最后一个之外的每个分类操作通过以下分类操作中的一个或多个对待处理的缺陷的至少一部分进行排序。

公开(公告)号：US09070180B2

公开(公告)日：2015-06-30

申请号：US13773549

申请日：2013-02-21

Applicant: Applied Materials Israel Ltd.

Inventor： Moshe Amzaleg ,  Yehuda Cohen ,  Nir Ben-David Dodzin ,  Efrat Rozenman

IPC: G06K9/00 ,  G06T7/00 ,  H01L21/67

CPC classification number: G06T7/001 ,  G06T7/0002 ,  G06T2207/30148 ,  H01L21/67288

Abstract: A defect detection system for computerized detection of defects in an inspected object based on processing of an inspection image generated by collecting signals arriving from the inspected object, the system including: an interface for obtaining an inspected noise-indicative value and multiple reference noise-indicative values, the inspected noise-indicative value representative of an analyzed pixel and each of the reference noise-indicative values representative of a reference pixel among a plurality of reference pixels; and a processor, including: a noise analysis module, configured to compute a representative noise-indicative value based on a plurality of noise-indicative values which includes the inspected noise-indicative value and the multiple reference noise-indicative values; and a defect analysis module, configured to calculate a defect-indicative value based on an inspected value representative of the analyzed pixel, and to determine a presence of a defect in the analyzed pixel based on the representative noise-indicative value and the defect-indicative value.

Abstract translation: 一种用于基于通过收集从被检查对象到达的信号产生的检查图像的处理来对被检查对象中的缺陷进行计算机化检测的缺陷检测系统，所述系统包括：用于获得被检查的噪声指示值和多个参考噪声指示值的接口 值，表示分析像素的被检查噪声指示值和表示多个参考像素中的参考像素的每个参考噪声指示值; 以及处理器，包括：噪声分析模块，被配置为基于包括所检查的噪声指示值和所述多个参考噪声指示值的多个噪声指示值来计算代表性噪声指示值; 以及缺陷分析模块，被配置为基于代表所分析的像素的检查值来计算缺陷指示值，并且基于代表性的噪声指示值和缺陷指示值来确定所分析的像素中的缺陷的存在 值。