发明授权
- 专利标题: Photoresist composition and method for forming a metal pattern
- 专利标题(中): 用于形成金属图案的光刻胶组合物和方法
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申请号: US13911984申请日: 2013-06-06
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公开(公告)号: US09417521B2公开(公告)日: 2016-08-16
- 发明人: Ki-Hyun Cho , Hoon Kang , Jae-Sung Kim , Dong-Min Kim , Seung-Ki Kim , Eun Jeagal
- 申请人: Samsung Display Co., LTD.
- 申请人地址: KR
- 专利权人: Samsung Display Co., Ltd.
- 当前专利权人: Samsung Display Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Innovation Counsel LLP
- 优先权: KR10-2013-0000141 20130102
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/40 ; G03F7/038 ; G03F7/016 ; G03F7/022 ; G03F7/039 ; G03F7/09 ; G03F7/16 ; G03F7/30 ; G03F7/36 ; G03F7/38
摘要:
A method of forming a metal pattern is disclosed. In the method, a metal layer is formed on a base substrate. A photoresist composition is coated on the metal layer to form a coating layer. The photoresist composition includes a binder resin, a photo-sensitizer and a mixed solvent including a first solvent, a second solvent having a higher volatility than the first solvent, and a third solvent having a higher volatility than the second solvent. The coating layer is exposed to light. The coating layer is partially removed to form a photoresist pattern. The metal layer is patterned by using the photoresist pattern as a mask.
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