Invention Grant
- Patent Title: Method for manufacturing ceramic substrate
- Patent Title (中): 制造陶瓷基板的方法
-
Application No.: US14808656Application Date: 2015-07-24
-
Publication No.: US09437549B2Publication Date: 2016-09-06
- Inventor: Chien-Hung Ho , Chen-Shen Kuo , Chun-Chu Wu
- Applicant: VIKING TECH CORPORATION
- Applicant Address: TW Hsinchu County
- Assignee: VIKING TECH CORPORATION
- Current Assignee: VIKING TECH CORPORATION
- Current Assignee Address: TW Hsinchu County
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW103125263A 20140724
- Main IPC: H01L23/538
- IPC: H01L23/538 ; H01L23/498 ; H01L31/0203 ; H01L21/48 ; B28B11/08 ; B23K26/38 ; B24C1/04 ; B23K26/40 ; H01L33/64 ; H01L23/24

Abstract:
A method for manufacturing a ceramic substrate is characterized in using a preformed trench, a patterned protective layer and a sand blasting process to manufacture a cavity in a ceramic substrate and control the cavity size and shape of the ceramic substrate. The ceramic substrate is collocated with a base substrate to form a package substrate for packaging a semiconductor chip. The manufacturing method set forth above can lower the manufacturing cost and raise the accuracy of the size and shape of the cavity of the ceramic substrate. The abovementioned method can reduce the fabrication cost and increase the precision of the shape and size of a ceramic substrate.
Public/Granted literature
Information query
IPC分类: