Invention Grant
- Patent Title: Chemical vapor deposition raw material containing organic nickel compound, and chemical vapor deposition method using the chemical vapor deposition raw material
- Patent Title (中): 含有机镍化合物的化学气相沉积原料,以及使用化学气相沉积原料的化学气相沉积法
-
Application No.: US14890485Application Date: 2013-12-27
-
Publication No.: US09447495B2Publication Date: 2016-09-20
- Inventor: Kazuharu Suzuki , Masayuki Saito , Ryosuke Harada , Shunichi Nabeya , Satoshi Miyazaki
- Applicant: TANAKA KIKINZOKU KOGYO K.K.
- Applicant Address: JP Tokyo
- Assignee: Tanaka Kikinzoku Kogyo K.K.
- Current Assignee: Tanaka Kikinzoku Kogyo K.K.
- Current Assignee Address: JP Tokyo
- Agency: Orrick Herrington & Sutcliffe, LLP
- Priority: JP2013-108030 20130522
- International Application: PCT/JP2013/085069 WO 20131227
- International Announcement: WO2014/188629 WO 20141127
- Main IPC: C23C16/18
- IPC: C23C16/18 ; C07F15/00 ; C07F15/04

Abstract:
The present invention provides a chemical vapor deposition raw material, which has a low melting point, has heat stability such that no thermal decomposition occurs during vaporization, readily decomposes at low temperature during film-formation, and can stably form a nickel thin-film having fewer impurities. The present invention relates to a chemical vapor deposition raw material containing an organic nickel compound, in which a cyclopentadienyl group or a derivative thereof is coordinated to nickel, and a cycloalkenyl group having one allyl group or a derivative thereof is coordinated to the carbon skeleton of cycloalkyl. This raw material has a low melting point, proper heat stability and film-formation ability at low temperature. Further, due to a high vapor pressure, the raw material is suitable for a three-dimensional electrode material having a three-dimensional structure.
Public/Granted literature
Information query
IPC分类: